| Original language | Japanese |
|---|---|
| Pages (from-to) | 1739-1742 |
| Number of pages | 4 |
| Journal | 精密工学会誌 |
| Volume | 64 |
| Issue number | 12 |
| Publication status | Published - 1998 |
単結晶シリコンの放電加工(共著)
Research output: Contribution to journal › Article
Research output: Contribution to journal › Article
| Original language | Japanese |
|---|---|
| Pages (from-to) | 1739-1742 |
| Number of pages | 4 |
| Journal | 精密工学会誌 |
| Volume | 64 |
| Issue number | 12 |
| Publication status | Published - 1998 |