| Original language | Japanese |
|---|---|
| Pages (from-to) | 14-21 |
| Number of pages | 8 |
| Journal | 電気加工学会誌 |
| Volume | 34 |
| Issue number | (75) |
| Publication status | Published - 2000 |
単結晶シリコンインゴットの放電スライシング法
Research output: Contribution to journal › Article
Research output: Contribution to journal › Article
| Original language | Japanese |
|---|---|
| Pages (from-to) | 14-21 |
| Number of pages | 8 |
| Journal | 電気加工学会誌 |
| Volume | 34 |
| Issue number | (75) |
| Publication status | Published - 2000 |