| Original language | Japanese |
|---|---|
| Pages (from-to) | 1725-1729 |
| Number of pages | 5 |
| Journal | 精密工学会誌 |
| Volume | 63 |
| Issue number | 12 |
| Publication status | Published - 1997 |
単結晶シリコンインゴットの高能率貫通穴放電加工に関する研究(共著)
Research output: Contribution to journal › Article
Research output: Contribution to journal › Article
| Original language | Japanese |
|---|---|
| Pages (from-to) | 1725-1729 |
| Number of pages | 5 |
| Journal | 精密工学会誌 |
| Volume | 63 |
| Issue number | 12 |
| Publication status | Published - 1997 |