| Original language | Japanese |
|---|---|
| Pages (from-to) | FE0197-FE0197 |
| Number of pages | 1 |
| Journal | 日本機械学会論文集 |
| Volume | 80 |
| Issue number | 815 |
| Publication status | Published - 2014 |
枚葉式半導体洗浄機モデル内渦構造の PIV 計測
Research output: Contribution to journal › Article
Research output: Contribution to journal › Article
| Original language | Japanese |
|---|---|
| Pages (from-to) | FE0197-FE0197 |
| Number of pages | 1 |
| Journal | 日本機械学会論文集 |
| Volume | 80 |
| Issue number | 815 |
| Publication status | Published - 2014 |