| Original language | Japanese |
|---|---|
| Pages (from-to) | 135-138 |
| Number of pages | 4 |
| Journal | 真空 |
| Volume | 37 |
| Issue number | 3 |
| Publication status | Published - 1994 |
負イオン注入における絶縁した電極表面の帯電電位のイオン電流密度依存性
Research output: Contribution to journal › Article
Research output: Contribution to journal › Article
| Original language | Japanese |
|---|---|
| Pages (from-to) | 135-138 |
| Number of pages | 4 |
| Journal | 真空 |
| Volume | 37 |
| Issue number | 3 |
| Publication status | Published - 1994 |