| Original language | Japanese |
|---|---|
| Pages (from-to) | 796-796 |
| Number of pages | 1 |
| Journal | 真空 |
| Volume | 38 |
| Issue number | 9 |
| Publication status | Published - 1995 |
負イオン注入における絶縁物からの放出二次電子の測定
Research output: Contribution to journal › Article
Research output: Contribution to journal › Article
| Original language | Japanese |
|---|---|
| Pages (from-to) | 796-796 |
| Number of pages | 1 |
| Journal | 真空 |
| Volume | 38 |
| Issue number | 9 |
| Publication status | Published - 1995 |