@inproceedings{96467a6ffd724331ac6d3fc2bfde74cc,
title = "A method using the base plate jerk feedback to control the positioning of a pneumatic stage Control of the stage vibration caused by the reaction force",
abstract = "In this paper, a pneumatic positioning stage is considered. The stage is moved by the driving force and the reaction force leads the base plate to vibrate, resulting in the fluctuation of the stage in the opposite direction. In order to reduce the effect of the reaction force and improve the positioning time, the base plate jerk feedback is proposed. This feedback is firstly realized using an external force exerted to the base plate and then applied for the real condition of positioning. The experimental results show the effectiveness of the proposed method.",
keywords = "PDD compensator, base plate, coil-type spring isolator, jerk feedback, perfect integrator, pneumatic stage, positioning",
author = "Mohebullah Wali and Yukinori Nakamura and Shinji Wakui",
year = "2011",
month = aug,
day = "29",
language = "English",
isbn = "9788995605646",
series = "ASCC 2011 - 8th Asian Control Conference - Final Program and Proceedings",
pages = "629--634",
booktitle = "ASCC 2011 - 8th Asian Control Conference - Final Program and Proceedings",
note = "8th Asian Control Conference, ASCC 2011 ; Conference date: 15-05-2011 Through 18-05-2011",
}