A micro ultrasonic motor using a micro-machined cylindrical bulk PZT transducer

Takefumi Kanda, Akira Makino, Tomohisa Ono, Koichi Suzumori, Takeshi Morita, Minoru Kuribayashi Kurosawa

Research output: Contribution to journalArticlepeer-review

115 Citations (Scopus)


In this paper, a micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. The cylindrical shaped bulk piezoelectric transducer, a diameter of 0.8 mm and a height of 2.2 mm, was developed as stator transducer for traveling wave type ultrasonic motor. The transducer was made of lead zirconate titanate (PZT) bulk ceramics, and formed by micro machining, Ni plating and laser beam cutting process. Using this stator transducer, we have fabricated a cylindrical micro ultrasonic motor, a diameter of 2.0 mm and a height of 5.9 mm. We have also evaluated some characteristics and succeeded in driving the micro ultrasonic motor.

Original languageEnglish
Pages (from-to)131-138
Number of pages8
JournalSensors and Actuators, A: Physical
Issue number1
Publication statusPublished - Feb 28 2006


  • Bulk piezoelectric material
  • Micro machining
  • Micro motor
  • Piezoelectric actuator
  • Ultrasonic motor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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