A micro ultrasonic motor using a micro-machined cylindrical bulk PZT transducer

Takefumi Kanda; Akira Makino; Tomohisa Ono; Koichi Suzumori; Takeshi Morita; Minoru Kuribayashi Kurosawa

doi:10.1016/j.sna.2005.10.056

A micro ultrasonic motor using a micro-machined cylindrical bulk PZT transducer

Takefumi Kanda
, Akira Makino
, Tomohisa Ono
, Koichi Suzumori
, Takeshi Morita
, Minoru Kuribayashi Kurosawa

Research output: Contribution to journal › Article › peer-review

128 Citations (Scopus)

Abstract

In this paper, a micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. The cylindrical shaped bulk piezoelectric transducer, a diameter of 0.8 mm and a height of 2.2 mm, was developed as stator transducer for traveling wave type ultrasonic motor. The transducer was made of lead zirconate titanate (PZT) bulk ceramics, and formed by micro machining, Ni plating and laser beam cutting process. Using this stator transducer, we have fabricated a cylindrical micro ultrasonic motor, a diameter of 2.0 mm and a height of 5.9 mm. We have also evaluated some characteristics and succeeded in driving the micro ultrasonic motor.

Original language	English
Pages (from-to)	131-138
Number of pages	8
Journal	Sensors and Actuators, A: Physical
Volume	127
Issue number	1
DOIs	https://doi.org/10.1016/j.sna.2005.10.056
Publication status	Published - Feb 28 2006

Keywords

Bulk piezoelectric material
Micro machining
Micro motor
Piezoelectric actuator
Ultrasonic motor

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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10.1016/j.sna.2005.10.056

Cite this

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title = "A micro ultrasonic motor using a micro-machined cylindrical bulk PZT transducer",

abstract = "In this paper, a micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. The cylindrical shaped bulk piezoelectric transducer, a diameter of 0.8 mm and a height of 2.2 mm, was developed as stator transducer for traveling wave type ultrasonic motor. The transducer was made of lead zirconate titanate (PZT) bulk ceramics, and formed by micro machining, Ni plating and laser beam cutting process. Using this stator transducer, we have fabricated a cylindrical micro ultrasonic motor, a diameter of 2.0 mm and a height of 5.9 mm. We have also evaluated some characteristics and succeeded in driving the micro ultrasonic motor.",

keywords = "Bulk piezoelectric material, Micro machining, Micro motor, Piezoelectric actuator, Ultrasonic motor",

author = "Takefumi Kanda and Akira Makino and Tomohisa Ono and Koichi Suzumori and Takeshi Morita and Kurosawa, \{Minoru Kuribayashi\}",

note = "Funding Information: This work was supported by the Mazda Foundation, and by the Cooperation of Innovative Technology and Advanced Research in Evolutional Area (CITY AREA) of the Ministry of Education, Culture, Sports, Science and Technology. ",

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AU - Makino, Akira

AU - Ono, Tomohisa

AU - Suzumori, Koichi

AU - Morita, Takeshi

AU - Kurosawa, Minoru Kuribayashi

N1 - Funding Information: This work was supported by the Mazda Foundation, and by the Cooperation of Innovative Technology and Advanced Research in Evolutional Area (CITY AREA) of the Ministry of Education, Culture, Sports, Science and Technology.

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Y1 - 2006/2/28

N2 - In this paper, a micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. The cylindrical shaped bulk piezoelectric transducer, a diameter of 0.8 mm and a height of 2.2 mm, was developed as stator transducer for traveling wave type ultrasonic motor. The transducer was made of lead zirconate titanate (PZT) bulk ceramics, and formed by micro machining, Ni plating and laser beam cutting process. Using this stator transducer, we have fabricated a cylindrical micro ultrasonic motor, a diameter of 2.0 mm and a height of 5.9 mm. We have also evaluated some characteristics and succeeded in driving the micro ultrasonic motor.

AB - In this paper, a micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. The cylindrical shaped bulk piezoelectric transducer, a diameter of 0.8 mm and a height of 2.2 mm, was developed as stator transducer for traveling wave type ultrasonic motor. The transducer was made of lead zirconate titanate (PZT) bulk ceramics, and formed by micro machining, Ni plating and laser beam cutting process. Using this stator transducer, we have fabricated a cylindrical micro ultrasonic motor, a diameter of 2.0 mm and a height of 5.9 mm. We have also evaluated some characteristics and succeeded in driving the micro ultrasonic motor.

KW - Bulk piezoelectric material

KW - Micro machining

KW - Micro motor

KW - Piezoelectric actuator

KW - Ultrasonic motor

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A micro ultrasonic motor using a micro-machined cylindrical bulk PZT transducer

Abstract

Keywords

ASJC Scopus subject areas

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