A rod-shaped vibro touch sensor using PZT thin film

Takefumi Kanda; Takeshi Morita; Minoru Kuribayashi Kurosawa; Toshiro Higuchi

doi:10.1109/58.775653

A rod-shaped vibro touch sensor using PZT thin film

Takefumi Kanda, Takeshi Morita, Minoru Kuribayashi Kurosawa, Toshiro Higuchi

Research output: Contribution to journal › Article › peer-review

29 Citations (Scopus)

Abstract

We have fabricated a probe sensor. This sensor is for high precision coordinate measuring machines, surface roughness measuring tools, or scanning probe microscopes (SPM). This sensor consists of a rod vibrating in the axial direction. The longitudinal vibration was excited and also detected by PZT thin film. The PZT thin Him was fabricated by a hydrothermal method. The hydrothermal method uses the reaction process in hot and high pressure aqueous solutions. We made a 27.8-mm long sensor. Its resonance frequency was 116 kHz. The sensitivity and resolution were evaluated by experiments. We succeeded in oscillating the rod and detecting the contact.

Original language	English
Pages (from-to)	875-882
Number of pages	8
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume	46
Issue number	4
DOIs	https://doi.org/10.1109/58.775653
Publication status	Published - Jul 1999
Externally published	Yes

ASJC Scopus subject areas

Instrumentation
Acoustics and Ultrasonics
Electrical and Electronic Engineering

Access to Document

10.1109/58.775653

Cite this

@article{b8bc47eba0b8402381b69344d0267c9a,

title = "A rod-shaped vibro touch sensor using PZT thin film",

abstract = "We have fabricated a probe sensor. This sensor is for high precision coordinate measuring machines, surface roughness measuring tools, or scanning probe microscopes (SPM). This sensor consists of a rod vibrating in the axial direction. The longitudinal vibration was excited and also detected by PZT thin film. The PZT thin Him was fabricated by a hydrothermal method. The hydrothermal method uses the reaction process in hot and high pressure aqueous solutions. We made a 27.8-mm long sensor. Its resonance frequency was 116 kHz. The sensitivity and resolution were evaluated by experiments. We succeeded in oscillating the rod and detecting the contact.",

author = "Takefumi Kanda and Takeshi Morita and Kurosawa, {Minoru Kuribayashi} and Toshiro Higuchi",

year = "1999",

month = jul,

doi = "10.1109/58.775653",

language = "English",

volume = "46",

pages = "875--882",

journal = "IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control",

issn = "0885-3010",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "4",

}

TY - JOUR

T1 - A rod-shaped vibro touch sensor using PZT thin film

AU - Kanda, Takefumi

AU - Morita, Takeshi

AU - Kurosawa, Minoru Kuribayashi

AU - Higuchi, Toshiro

PY - 1999/7

Y1 - 1999/7

N2 - We have fabricated a probe sensor. This sensor is for high precision coordinate measuring machines, surface roughness measuring tools, or scanning probe microscopes (SPM). This sensor consists of a rod vibrating in the axial direction. The longitudinal vibration was excited and also detected by PZT thin film. The PZT thin Him was fabricated by a hydrothermal method. The hydrothermal method uses the reaction process in hot and high pressure aqueous solutions. We made a 27.8-mm long sensor. Its resonance frequency was 116 kHz. The sensitivity and resolution were evaluated by experiments. We succeeded in oscillating the rod and detecting the contact.

AB - We have fabricated a probe sensor. This sensor is for high precision coordinate measuring machines, surface roughness measuring tools, or scanning probe microscopes (SPM). This sensor consists of a rod vibrating in the axial direction. The longitudinal vibration was excited and also detected by PZT thin film. The PZT thin Him was fabricated by a hydrothermal method. The hydrothermal method uses the reaction process in hot and high pressure aqueous solutions. We made a 27.8-mm long sensor. Its resonance frequency was 116 kHz. The sensitivity and resolution were evaluated by experiments. We succeeded in oscillating the rod and detecting the contact.

UR - http://www.scopus.com/inward/record.url?scp=0032645817&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0032645817&partnerID=8YFLogxK

U2 - 10.1109/58.775653

DO - 10.1109/58.775653

M3 - Article

C2 - 18238491

AN - SCOPUS:0032645817

SN - 0885-3010

VL - 46

SP - 875

EP - 882

JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

IS - 4

ER -

A rod-shaped vibro touch sensor using PZT thin film

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this