Original language | English |
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Pages (from-to) | 252-259 |
Journal | Journal of Advanced Mechanical Design, Systems and Manufacturing |
Volume | 6 |
Issue number | 2 |
Publication status | Published - Feb 2012 |
A Role of Base Plate Jerk Feedback Scheme for Suppression of the Self Vibration in a Pneumatic Positioning Stage
Wali Mohebullah, Yukinori Nakamura, Shinji Wakui
Research output: Contribution to journal › Article › peer-review