An interpretation of unbalance vibration compensator for five-axes active magnetic bearing systems based on internal model principle

Taiki Nakamura; Shinji Wakui; Yukinori Nakamura

doi:10.1109/ICAMechS.2015.7287143

An interpretation of unbalance vibration compensator for five-axes active magnetic bearing systems based on internal model principle

Taiki Nakamura, Shinji Wakui, Yukinori Nakamura

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

7 Citations (Scopus)

Abstract

Five-axes active magnetic bearing (AMB) systems are widely utilized for the field of precision such as semiconductor exposure machines. This paper considers an interpretation of an unbalance vibration compensator PGC for five-axes AMB. As methods for the rejection of periodic disturbance, repetitive control and PIS control, which are based on internal model principle, have been known. The PIS control can be considered as a special case of the repetitive control. This paper investigates the relationship between the PGC and the PIS control from the similarity of the pole assignment and shows that the PGC suppresses the unbalance vibration from the perspective of the internal model principle.

Original language	English
Title of host publication	2015 International Conference on Advanced Mechatronic Systems, ICAMechS 2015
Publisher	IEEE Computer Society
Pages	137-142
Number of pages	6
Volume	2015-October
ISBN (Electronic)	9781467379960
DOIs	https://doi.org/10.1109/ICAMechS.2015.7287143
Publication status	Published - Oct 1 2015
Externally published	Yes
Event	International Conference on Advanced Mechatronic Systems, ICAMechS 2015 - Beijing, China Duration: Aug 22 2015 → Aug 24 2015

Other

Other	International Conference on Advanced Mechatronic Systems, ICAMechS 2015
Country/Territory	China
City	Beijing
Period	8/22/15 → 8/24/15

Keywords

internal model principle
magnetic bearing
PGC
PIS control
repetitive control
unbalance vibration

ASJC Scopus subject areas

Electrical and Electronic Engineering
Mechanical Engineering

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10.1109/ICAMechS.2015.7287143

Cite this

Nakamura, T., Wakui, S., & Nakamura, Y. (2015). An interpretation of unbalance vibration compensator for five-axes active magnetic bearing systems based on internal model principle. In 2015 International Conference on Advanced Mechatronic Systems, ICAMechS 2015 (Vol. 2015-October, pp. 137-142). Article 7287143 IEEE Computer Society. https://doi.org/10.1109/ICAMechS.2015.7287143

An interpretation of unbalance vibration compensator for five-axes active magnetic bearing systems based on internal model principle. / Nakamura, Taiki; Wakui, Shinji; Nakamura, Yukinori.
2015 International Conference on Advanced Mechatronic Systems, ICAMechS 2015. Vol. 2015-October IEEE Computer Society, 2015. p. 137-142 7287143.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nakamura, T, Wakui, S & Nakamura, Y 2015, An interpretation of unbalance vibration compensator for five-axes active magnetic bearing systems based on internal model principle. in 2015 International Conference on Advanced Mechatronic Systems, ICAMechS 2015. vol. 2015-October, 7287143, IEEE Computer Society, pp. 137-142, International Conference on Advanced Mechatronic Systems, ICAMechS 2015, Beijing, China, 8/22/15. https://doi.org/10.1109/ICAMechS.2015.7287143

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AB - Five-axes active magnetic bearing (AMB) systems are widely utilized for the field of precision such as semiconductor exposure machines. This paper considers an interpretation of an unbalance vibration compensator PGC for five-axes AMB. As methods for the rejection of periodic disturbance, repetitive control and PIS control, which are based on internal model principle, have been known. The PIS control can be considered as a special case of the repetitive control. This paper investigates the relationship between the PGC and the PIS control from the similarity of the pole assignment and shows that the PGC suppresses the unbalance vibration from the perspective of the internal model principle.

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An interpretation of unbalance vibration compensator for five-axes active magnetic bearing systems based on internal model principle

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Keywords

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