Application of ion-induced carbon nanocomposite fibers to magnetic force microscope probes

Yoshitaka Sugita, Masashi Kitazawa, M. Zamri, Masaki Tanemura, Yasuhiko Hayashi, Ryo Ohta

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)


Small-scale batch fabrication of Co-included carbon nanofibers (Co-CNFs) onto commercially available Si cantilevers for scanning probe microscope by an Ar+ -ion-irradiation method with a simultaneous Co supply was demonstrated (eight chips/batch). As confirmed by scanning and transmission electron microscopes equipped with energy dispersive x-ray spectroscopy, Co-CNFs were fibrous and contained Co and C. With increasing the Co supply rate, Co-CNFs decreased in length from ∼600 to ∼400 nm, whereas their diameter was almost independent of the Co supply rate, 20-30 nm. As proven by magnetic force microscope (MFM) measurements using the Co-CNF probes, they were applicable as MFM probes. Since various metals including alloys can be incorporated into CNFs, this ion-irradiation method with a simultaneous metal supply was believed to be quite promising for the functionalization of CNF probes for a variety of applications.

Original languageEnglish
Pages (from-to)980-983
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Issue number2
Publication statusPublished - 2009
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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