TY - JOUR
T1 - Application of ion-induced carbon nanocomposite fibers to magnetic force microscope probes
AU - Sugita, Yoshitaka
AU - Kitazawa, Masashi
AU - Zamri, M.
AU - Tanemura, Masaki
AU - Hayashi, Yasuhiko
AU - Ohta, Ryo
PY - 2009
Y1 - 2009
N2 - Small-scale batch fabrication of Co-included carbon nanofibers (Co-CNFs) onto commercially available Si cantilevers for scanning probe microscope by an Ar+ -ion-irradiation method with a simultaneous Co supply was demonstrated (eight chips/batch). As confirmed by scanning and transmission electron microscopes equipped with energy dispersive x-ray spectroscopy, Co-CNFs were fibrous and contained Co and C. With increasing the Co supply rate, Co-CNFs decreased in length from ∼600 to ∼400 nm, whereas their diameter was almost independent of the Co supply rate, 20-30 nm. As proven by magnetic force microscope (MFM) measurements using the Co-CNF probes, they were applicable as MFM probes. Since various metals including alloys can be incorporated into CNFs, this ion-irradiation method with a simultaneous metal supply was believed to be quite promising for the functionalization of CNF probes for a variety of applications.
AB - Small-scale batch fabrication of Co-included carbon nanofibers (Co-CNFs) onto commercially available Si cantilevers for scanning probe microscope by an Ar+ -ion-irradiation method with a simultaneous Co supply was demonstrated (eight chips/batch). As confirmed by scanning and transmission electron microscopes equipped with energy dispersive x-ray spectroscopy, Co-CNFs were fibrous and contained Co and C. With increasing the Co supply rate, Co-CNFs decreased in length from ∼600 to ∼400 nm, whereas their diameter was almost independent of the Co supply rate, 20-30 nm. As proven by magnetic force microscope (MFM) measurements using the Co-CNF probes, they were applicable as MFM probes. Since various metals including alloys can be incorporated into CNFs, this ion-irradiation method with a simultaneous metal supply was believed to be quite promising for the functionalization of CNF probes for a variety of applications.
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U2 - 10.1116/1.3010730
DO - 10.1116/1.3010730
M3 - Article
AN - SCOPUS:64549133028
SN - 1071-1023
VL - 27
SP - 980
EP - 983
JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
IS - 2
ER -