TY - JOUR
T1 - Atomic processes and equation of state of high Z plasmas for EUV sources and their effects on the spatial and temporal evolution of the plasmas
AU - Sasaki, Akira
AU - Sunahara, Atushi
AU - Furukawa, Hiroyuki
AU - Nishihara, Katsunobu
AU - Nishikawa, Takeshi
AU - Koike, Fumihiro
N1 - Funding Information:
The present work is supported by a Grant-in-Aid for Scientific Research (B) No. 23340185 from the Japan Society for the Promotion of Science (JSPS).
Publisher Copyright:
© Published under licence by IOP Publishing Ltd.
PY - 2016/4/1
Y1 - 2016/4/1
N2 - Laser-produced plasma (LPP) extreme ultraviolet (EUV) light sources have been intensively investigated due to potential application to next-generation semiconductor technology. Current studies focus on the atomic processes and hydrodynamics of plasmas to develop shorter wavelength sources at λ = 6.x nm as well as to improve the conversion efficiency (CE) of λ = 13.5 nm sources. This paper examines the atomic processes of mid-z elements, which are potential candidates for λ = 6.x nm source using n=3-3 transitions. Furthermore, a method to calculate the hydrodynamics of the plasmas in terms of the initial interaction between a relatively weak prepulse laser is presented.
AB - Laser-produced plasma (LPP) extreme ultraviolet (EUV) light sources have been intensively investigated due to potential application to next-generation semiconductor technology. Current studies focus on the atomic processes and hydrodynamics of plasmas to develop shorter wavelength sources at λ = 6.x nm as well as to improve the conversion efficiency (CE) of λ = 13.5 nm sources. This paper examines the atomic processes of mid-z elements, which are potential candidates for λ = 6.x nm source using n=3-3 transitions. Furthermore, a method to calculate the hydrodynamics of the plasmas in terms of the initial interaction between a relatively weak prepulse laser is presented.
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U2 - 10.1088/1742-6596/688/1/012099
DO - 10.1088/1742-6596/688/1/012099
M3 - Conference article
AN - SCOPUS:84964861559
SN - 1742-6588
VL - 688
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
IS - 1
M1 - 012099
T2 - 8th International Conference on Inertial Fusion Sciences and Applications, IFSA 2013
Y2 - 8 September 2013 through 13 September 2013
ER -