Laser-produced plasma (LPP) extreme ultraviolet (EUV) light sources have been intensively investigated due to potential application to next-generation semiconductor technology. Current studies focus on the atomic processes and hydrodynamics of plasmas to develop shorter wavelength sources at λ = 6.x nm as well as to improve the conversion efficiency (CE) of λ = 13.5 nm sources. This paper examines the atomic processes of mid-z elements, which are potential candidates for λ = 6.x nm source using n=3-3 transitions. Furthermore, a method to calculate the hydrodynamics of the plasmas in terms of the initial interaction between a relatively weak prepulse laser is presented.
|Journal||Journal of Physics: Conference Series|
|Publication status||Published - Apr 1 2016|
|Event||8th International Conference on Inertial Fusion Sciences and Applications, IFSA 2013 - Nara, Japan|
Duration: Sept 8 2013 → Sept 13 2013
ASJC Scopus subject areas
- Physics and Astronomy(all)