Attitude control of pneumatic active anti-vibration apparatuses with two degrees-of-freedom in shutdown process

Satoru Goto; Yukinori Nakamura; Shinji Wakui

doi:10.1109/ICIT.2015.7125086

Attitude control of pneumatic active anti-vibration apparatuses with two degrees-of-freedom in shutdown process

Satoru Goto, Yukinori Nakamura, Shinji Wakui

Research output: Contribution to conference › Paper › peer-review

1 Citation (Scopus)

Abstract

For the ultra-precision machining, semiconductor exposure machines employ the pneumatic active anti-vibration apparatuses (AVAs), which have air springs. In industrial scenes, when the vibration due to earthquake is observed, the AVA is automatically stopped by exhausting air. However, the difference of time delays in the response of the air springs causes the undesirable rotational motion of an isolated table. This paper considers the attitude control of the AVA including different time delays during shutdown process. To avoid the rotation of the isolated table, reference trajectory is shaped. It is verified that the range of the rotational angle in the shutdown of the AVA can be reduced by using the proposed method.

Original language	English
Pages	119-124
Number of pages	6
DOIs	https://doi.org/10.1109/ICIT.2015.7125086
Publication status	Published - Jun 16 2015
Externally published	Yes
Event	2015 IEEE International Conference on Industrial Technology, ICIT 2015 - Seville, Spain Duration: Mar 17 2015 → Mar 19 2015

Other

Other	2015 IEEE International Conference on Industrial Technology, ICIT 2015
Country/Territory	Spain
City	Seville
Period	3/17/15 → 3/19/15

ASJC Scopus subject areas

Computer Science Applications
Electrical and Electronic Engineering

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10.1109/ICIT.2015.7125086

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title = "Attitude control of pneumatic active anti-vibration apparatuses with two degrees-of-freedom in shutdown process",

abstract = "For the ultra-precision machining, semiconductor exposure machines employ the pneumatic active anti-vibration apparatuses (AVAs), which have air springs. In industrial scenes, when the vibration due to earthquake is observed, the AVA is automatically stopped by exhausting air. However, the difference of time delays in the response of the air springs causes the undesirable rotational motion of an isolated table. This paper considers the attitude control of the AVA including different time delays during shutdown process. To avoid the rotation of the isolated table, reference trajectory is shaped. It is verified that the range of the rotational angle in the shutdown of the AVA can be reduced by using the proposed method.",

author = "Satoru Goto and Yukinori Nakamura and Shinji Wakui",

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doi = "10.1109/ICIT.2015.7125086",

language = "English",

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AU - Goto, Satoru

AU - Nakamura, Yukinori

AU - Wakui, Shinji

PY - 2015/6/16

Y1 - 2015/6/16

N2 - For the ultra-precision machining, semiconductor exposure machines employ the pneumatic active anti-vibration apparatuses (AVAs), which have air springs. In industrial scenes, when the vibration due to earthquake is observed, the AVA is automatically stopped by exhausting air. However, the difference of time delays in the response of the air springs causes the undesirable rotational motion of an isolated table. This paper considers the attitude control of the AVA including different time delays during shutdown process. To avoid the rotation of the isolated table, reference trajectory is shaped. It is verified that the range of the rotational angle in the shutdown of the AVA can be reduced by using the proposed method.

AB - For the ultra-precision machining, semiconductor exposure machines employ the pneumatic active anti-vibration apparatuses (AVAs), which have air springs. In industrial scenes, when the vibration due to earthquake is observed, the AVA is automatically stopped by exhausting air. However, the difference of time delays in the response of the air springs causes the undesirable rotational motion of an isolated table. This paper considers the attitude control of the AVA including different time delays during shutdown process. To avoid the rotation of the isolated table, reference trajectory is shaped. It is verified that the range of the rotational angle in the shutdown of the AVA can be reduced by using the proposed method.

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T2 - 2015 IEEE International Conference on Industrial Technology, ICIT 2015

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Attitude control of pneumatic active anti-vibration apparatuses with two degrees-of-freedom in shutdown process

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