Charging Potential Measurement of Photoresist-Layer Surface during Negative-Ion Implantation from Ion-Induced Secondary Electron Energy Analysis

Hiroshi Tsuji, Shoji Nagumo, Yoshitaka Toyota, Shigeki Sakai, Yasuhito Gotoh, Junzo Ishikawa

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

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