| Original language | English |
|---|---|
| Pages (from-to) | 91-103 |
| Number of pages | 13 |
| Journal | Memoirs of the Faculty of Engineering Okayama University |
| Volume | 42 |
| Publication status | Published - 2008 |
Cooperation of Production, ProductHandling and Transfer Scheduling for Semiconductor Fabrication
Research output: Contribution to journal › Article