@inproceedings{1c5a67b03edc40f59a8ebadde7db1148,
title = "Deadlock avoidance policy for dual-Armed multi-cluster tools with multi-flow",
abstract = "Cluster tools are widely used for semiconductor manufacturing. Scheduling of multi-cluster tools has been received much attention. A cluster tool consists of several processing modules, transfer module with single or dual-Armed handling robot and loadlock modules. The multi-cluster tool consists of two or three cluster tools which are connected with buffer module. In this paper, we present a deadlock-free scheduling for dual-Armed multi-cluster tools with multi-flow. We develop a deadlock avoidance policy for dual-Armed multi-cluster tools with dual path. A Petri net model is analyzed to derive a deadlock avoidance policy. The deadlock-freeness is confirmed by analyzing siphon of Petri net model. The deadlock-free scheduling method is proposed. The proposed method is applied to the scheduling problem of three-cluster tools with dual path. The computational results show that no deadlock occurs with the proposed deadlock avoidance policy.",
keywords = "deadlock avoidance, multi-cluster tools, Petri nets, simulation, siphon",
author = "Yushin Watanabe and Tatsushi Nishi",
year = "2014",
month = nov,
day = "18",
doi = "10.1109/IEEM.2013.6962484",
language = "English",
series = "IEEE International Conference on Industrial Engineering and Engineering Management",
publisher = "IEEE Computer Society",
pages = "611--615",
booktitle = "IEEE International Conference on Industrial Engineering and Engineering Management",
address = "United States",
note = "2013 IEEE International Conference on Industrial Engineering and Engineering Management, IEEM 2013 ; Conference date: 10-12-2013 Through 13-12-2013",
}