Design and evaluation of orifice arrangement for particle-excitation flow control valve

Daisuke Hirooka, Koichi Suzumori, Takefumi Kanda

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)


In this article, we report a new particle-excitation flow control valve. The purpose of this study is the development of a particle-excitation flow control valve that can precisely control pneumatic cylinders. We have reported this flow control valve principle. The valve, driven by a PZT vibrator, has a simple lightweight structure with large flow rate. We report the relationship between the orifice arrangement and flow rate characteristics of the valve. We have designed a new prototype for the purpose of high controllability. We have measured flow-rate characteristics and confirmed the conditions necessary for continuous adjustment of flow quantity. The control valve works successfully to realize a change in flow rate.

Original languageEnglish
Pages (from-to)283-291
Number of pages9
JournalSensors and Actuators, A: Physical
Issue number2
Publication statusPublished - Nov 2011


  • Flow control valve
  • PZT
  • Pneumatic valve
  • Pnumatic actuator

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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