Design and testing of rotors for a cylindrical micro-machined micro ultrasonic motor

T. Kanda, Y. Oomori, A. Makino, K. Suzumori, A. Kobayashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)


In this paper, a design and testing of rotors for a micro ultrasonic motor using micro-machined cylindrical bulk piezoelectric vibrator is introduced. This motor consists of the vibrator, a glass case and a rotor. The diameter of the piezoelectric vibrator was 0.8 mm and that of the motor case was 1.8 mm. Since the stator transducer is fixed at the end of the cylinder, it is easy to support the vibrator and the structure of the motor was not complicated. In addition, the vibrator and rotor were supported by glass case. This is important for micro ultrasonic motor because it is difficult to support the vibrator when the vibrator was miniaturized. We have fabricated and evaluated some types of rotors for the cylindrical shaped traveling type micro ultrasonic motor using this vibrator.

Original languageEnglish
Title of host publication2005 IEEE Ultrasonics Symposium
Number of pages4
Publication statusPublished - Dec 1 2005
Event2005 IEEE Ultrasonics Symposium - Rotterdam, Netherlands
Duration: Sept 18 2005Sept 21 2005

Publication series

NameProceedings - IEEE Ultrasonics Symposium
ISSN (Print)1051-0117


Other2005 IEEE Ultrasonics Symposium


  • Bulk piezoelectric material
  • Micro machining
  • Micromotor
  • Piezoelectric actuator
  • Ultrasonicmotor

ASJC Scopus subject areas

  • Acoustics and Ultrasonics


Dive into the research topics of 'Design and testing of rotors for a cylindrical micro-machined micro ultrasonic motor'. Together they form a unique fingerprint.

Cite this