TY - GEN
T1 - Design and testing of rotors for a cylindrical micro-machined micro ultrasonic motor
AU - Kanda, T.
AU - Oomori, Y.
AU - Makino, A.
AU - Suzumori, K.
AU - Kobayashi, A.
PY - 2005/12/1
Y1 - 2005/12/1
N2 - In this paper, a design and testing of rotors for a micro ultrasonic motor using micro-machined cylindrical bulk piezoelectric vibrator is introduced. This motor consists of the vibrator, a glass case and a rotor. The diameter of the piezoelectric vibrator was 0.8 mm and that of the motor case was 1.8 mm. Since the stator transducer is fixed at the end of the cylinder, it is easy to support the vibrator and the structure of the motor was not complicated. In addition, the vibrator and rotor were supported by glass case. This is important for micro ultrasonic motor because it is difficult to support the vibrator when the vibrator was miniaturized. We have fabricated and evaluated some types of rotors for the cylindrical shaped traveling type micro ultrasonic motor using this vibrator.
AB - In this paper, a design and testing of rotors for a micro ultrasonic motor using micro-machined cylindrical bulk piezoelectric vibrator is introduced. This motor consists of the vibrator, a glass case and a rotor. The diameter of the piezoelectric vibrator was 0.8 mm and that of the motor case was 1.8 mm. Since the stator transducer is fixed at the end of the cylinder, it is easy to support the vibrator and the structure of the motor was not complicated. In addition, the vibrator and rotor were supported by glass case. This is important for micro ultrasonic motor because it is difficult to support the vibrator when the vibrator was miniaturized. We have fabricated and evaluated some types of rotors for the cylindrical shaped traveling type micro ultrasonic motor using this vibrator.
KW - Bulk piezoelectric material
KW - Micro machining
KW - Micromotor
KW - Piezoelectric actuator
KW - Ultrasonicmotor
UR - http://www.scopus.com/inward/record.url?scp=33847107082&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33847107082&partnerID=8YFLogxK
U2 - 10.1109/ULTSYM.2005.1602855
DO - 10.1109/ULTSYM.2005.1602855
M3 - Conference contribution
AN - SCOPUS:33847107082
SN - 0780393821
SN - 9780780393820
T3 - Proceedings - IEEE Ultrasonics Symposium
SP - 301
EP - 304
BT - 2005 IEEE Ultrasonics Symposium
T2 - 2005 IEEE Ultrasonics Symposium
Y2 - 18 September 2005 through 21 September 2005
ER -