Development of EUV light source by laser-produced plasma

Y. Izawa; N. Miyanaga; H. Nishimura; S. Fujioka; T. Aota; Y. Tao; S. Uchida; Y. Shimada; K. Hashimoto; M. Yamaura; K. Nishihara; M. Murakami; A. Sunahara; H. Furukawa; A. Sasaki; W. Nishikawa; H. Tanuma; T. Norimatsu; K. Nagai; Q. Gu; M. Nakatsuka; H. Fujita; K. Tsubakimoto; H. Yoshida; K. Mima

doi:10.1051/jp4:2006133237

Development of EUV light source by laser-produced plasma

Y. Izawa, N. Miyanaga, H. Nishimura, S. Fujioka, T. Aota, Y. Tao, S. Uchida, Y. Shimada, K. Hashimoto, M. Yamaura, K. Nishihara, M. Murakami, A. Sunahara, H. Furukawa, A. Sasaki, W. Nishikawa, H. Tanuma, T. Norimatsu, K. Nagai, Q. GuM. Nakatsuka, H. Fujita, K. Tsubakimoto, H. Yoshida, K. Mima

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

We have been developing an EUV light source by laser-produced plasma for the use of EUV lithography system under the Leading Project promoted by MEXT. The project aims at understanding physics of laser plasma EUV source and providing database and guidelines for the practical EUV source. Progresses in theoretical modeling and experimental results are briefly reported.

Original language	English
Title of host publication	Proceedings - IFSA 2005
Subtitle of host publication	Inertial Fusion Sciences and Applications 2005
Pages	1161-1165
Number of pages	5
DOIs	https://doi.org/10.1051/jp4:2006133237
Publication status	Published - Jun 2006
Event	IFSA 2005: Inertial Fusion Sciences and Applications 2005 - Biarritz, France Duration: Sept 4 2005 → Sept 9 2005

Publication series

Name	Journal De Physique. IV : JP
Volume	133
ISSN (Print)	1155-4339
ISSN (Electronic)	1764-7177

Other

Other	IFSA 2005: Inertial Fusion Sciences and Applications 2005
Country/Territory	France
City	Biarritz
Period	9/4/05 → 9/9/05

ASJC Scopus subject areas

Physics and Astronomy(all)

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10.1051/jp4:2006133237

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Izawa, Y., Miyanaga, N., Nishimura, H., Fujioka, S., Aota, T., Tao, Y., Uchida, S., Shimada, Y., Hashimoto, K., Yamaura, M., Nishihara, K., Murakami, M., Sunahara, A., Furukawa, H., Sasaki, A., Nishikawa, W., Tanuma, H., Norimatsu, T., Nagai, K., ... Mima, K. (2006). Development of EUV light source by laser-produced plasma. In Proceedings - IFSA 2005: Inertial Fusion Sciences and Applications 2005 (pp. 1161-1165). (Journal De Physique. IV : JP; Vol. 133). https://doi.org/10.1051/jp4:2006133237

Izawa, Y, Miyanaga, N, Nishimura, H, Fujioka, S, Aota, T, Tao, Y, Uchida, S, Shimada, Y, Hashimoto, K, Yamaura, M, Nishihara, K, Murakami, M, Sunahara, A, Furukawa, H, Sasaki, A, Nishikawa, W, Tanuma, H, Norimatsu, T, Nagai, K, Gu, Q, Nakatsuka, M, Fujita, H, Tsubakimoto, K, Yoshida, H & Mima, K 2006, Development of EUV light source by laser-produced plasma. in Proceedings - IFSA 2005: Inertial Fusion Sciences and Applications 2005. Journal De Physique. IV : JP, vol. 133, pp. 1161-1165, IFSA 2005: Inertial Fusion Sciences and Applications 2005, Biarritz, France, 9/4/05. https://doi.org/10.1051/jp4:2006133237

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abstract = "We have been developing an EUV light source by laser-produced plasma for the use of EUV lithography system under the Leading Project promoted by MEXT. The project aims at understanding physics of laser plasma EUV source and providing database and guidelines for the practical EUV source. Progresses in theoretical modeling and experimental results are briefly reported.",

author = "Y. Izawa and N. Miyanaga and H. Nishimura and S. Fujioka and T. Aota and Y. Tao and S. Uchida and Y. Shimada and K. Hashimoto and M. Yamaura and K. Nishihara and M. Murakami and A. Sunahara and H. Furukawa and A. Sasaki and W. Nishikawa and H. Tanuma and T. Norimatsu and K. Nagai and Q. Gu and M. Nakatsuka and H. Fujita and K. Tsubakimoto and H. Yoshida and K. Mima",

year = "2006",

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doi = "10.1051/jp4:2006133237",

language = "English",

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series = "Journal De Physique. IV : JP",

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AU - Izawa, Y.

AU - Miyanaga, N.

AU - Nishimura, H.

AU - Fujioka, S.

AU - Aota, T.

AU - Tao, Y.

AU - Uchida, S.

AU - Shimada, Y.

AU - Hashimoto, K.

AU - Yamaura, M.

AU - Nishihara, K.

AU - Murakami, M.

AU - Sunahara, A.

AU - Furukawa, H.

AU - Sasaki, A.

AU - Nishikawa, W.

AU - Tanuma, H.

AU - Norimatsu, T.

AU - Nagai, K.

AU - Gu, Q.

AU - Nakatsuka, M.

AU - Fujita, H.

AU - Tsubakimoto, K.

AU - Yoshida, H.

AU - Mima, K.

PY - 2006/6

Y1 - 2006/6

N2 - We have been developing an EUV light source by laser-produced plasma for the use of EUV lithography system under the Leading Project promoted by MEXT. The project aims at understanding physics of laser plasma EUV source and providing database and guidelines for the practical EUV source. Progresses in theoretical modeling and experimental results are briefly reported.

AB - We have been developing an EUV light source by laser-produced plasma for the use of EUV lithography system under the Leading Project promoted by MEXT. The project aims at understanding physics of laser plasma EUV source and providing database and guidelines for the practical EUV source. Progresses in theoretical modeling and experimental results are briefly reported.

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SN - 9782868839251

T3 - Journal De Physique. IV : JP

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EP - 1165

BT - Proceedings - IFSA 2005

T2 - IFSA 2005: Inertial Fusion Sciences and Applications 2005

Y2 - 4 September 2005 through 9 September 2005

ER -

Development of EUV light source by laser-produced plasma

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