Development of EUV light source by laser-produced plasma

Y. Izawa, N. Miyanaga, H. Nishimura, S. Fujioka, T. Aota, Y. Tao, S. Uchida, Y. Shimada, K. Hashimoto, M. Yamaura, K. Nishihara, M. Murakami, A. Sunahara, H. Furukawa, A. Sasaki, W. Nishikawa, H. Tanuma, T. Norimatsu, K. Nagai, Q. GuM. Nakatsuka, H. Fujita, K. Tsubakimoto, H. Yoshida, K. Mima

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

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Physics & Astronomy