TY - JOUR
T1 - Effect of fluorine ion implantation on the microstructure and microhardness of AISI 440C stainless steel
AU - Hanamoto, K.
AU - Sasaki, M.
AU - Miyashita, T.
AU - Kido, Y.
AU - Nakayama, Y.
AU - Kawamoto, Y.
AU - Fujiwara, M.
AU - Kaigawa, R.
N1 - Funding Information:
The authors are grateful to Mr. T. Nakata and Mr. K. Sekine of the Ion Engineering ResearchI nstitute Corporation for helpful assistancea nd Prof. H. Namba of the De-partmento f Physics, RitsumeikanU niversity for helpful discussions. This work was supportedi n part by The Science ResearchP romotion Fund from Japan Private School Promotion Foundation.
PY - 1997/7
Y1 - 1997/7
N2 - AISI 440C stainless steel along with pure iron and chromium have been implanted with 30 keV fluorine ions at doses from 5 × 1016 to 6 × 1017 ions/cm2 and surface hardnesses of the 440C steel have been examined. Implanted regions inside the specimens were studied by X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD). The results of XPS and XRD measurements indicate the formation of FeF2 and suggest small grains of CrF2 and non-stoichiometric chromium fluorides in 440C steel. It may be concluded that an increase of the surface hardness in fluorine implanted 440C steel is related to precipitation of metal fluorides and surface oxidation.
AB - AISI 440C stainless steel along with pure iron and chromium have been implanted with 30 keV fluorine ions at doses from 5 × 1016 to 6 × 1017 ions/cm2 and surface hardnesses of the 440C steel have been examined. Implanted regions inside the specimens were studied by X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD). The results of XPS and XRD measurements indicate the formation of FeF2 and suggest small grains of CrF2 and non-stoichiometric chromium fluorides in 440C steel. It may be concluded that an increase of the surface hardness in fluorine implanted 440C steel is related to precipitation of metal fluorides and surface oxidation.
KW - 440C steel
KW - Fluorine ion implantation
KW - Vickers hardness
KW - X-ray diffraction
KW - X-ray photoelectron spectroscopy
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U2 - 10.1016/S0168-583X(97)00227-9
DO - 10.1016/S0168-583X(97)00227-9
M3 - Article
AN - SCOPUS:0031189497
SN - 0168-583X
VL - 129
SP - 228
EP - 232
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
IS - 2
ER -