Abstract
Effect of wavelength on machining characteristics of aluminum nitride in micro-drilling using Q-switched YAG harmonics was experimentally investigated. The depth of drilled hole increases with the decrease of wavelength, since photon energy and absorptivity becomes higher with decreasing the wavelength of laser beam. Besides, the energy loss by the plasma in laser processing decreases with decreasing the wavelength. Therefore, shorter wavelength is more effective in order to drill the micro-hole with high aspect ratio, when micro hole of high aspect ratio is drilled. Moreover, it is made it clear that the drilled depth under vacuum condition is deeper than that under the atmosphere pressure condition, since the removal of debris is carried out more efficiently compared the atmosphere pressure and assist gas supplying condition.
| Original language | English |
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| DOIs | |
| Publication status | Published - 2006 |
| Event | ICALEO 2006 - 25th International Congress on Applications of Laser and Electro-Optics - Scottsdale, AZ, United States Duration: Oct 30 2006 → Nov 2 2006 |
Other
| Other | ICALEO 2006 - 25th International Congress on Applications of Laser and Electro-Optics |
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| Country/Territory | United States |
| City | Scottsdale, AZ |
| Period | 10/30/06 → 11/2/06 |
ASJC Scopus subject areas
- Geochemistry and Petrology
- Electrical and Electronic Engineering