Effect of the satellite lines and opacity on the extreme ultraviolet emission from high-density Xe plasmas

Akira Sasaki; Katsunobu Nishihara; Masakatsu Murakami; Fumihiro Koike; Takashi Kagawa; Takashi Nishikawa; Kazumi Fujima; Tohru Kawamura; Hiroyuki Furukawa

doi:10.1063/1.1834994

Effect of the satellite lines and opacity on the extreme ultraviolet emission from high-density Xe plasmas

Akira Sasaki, Katsunobu Nishihara, Masakatsu Murakami, Fumihiro Koike, Takashi Kagawa, Takashi Nishikawa, Kazumi Fujima, Tohru Kawamura, Hiroyuki Furukawa

School of Engineering

Research output: Contribution to journal › Article › peer-review

47 Citations (Scopus)

Abstract

Extreme ultraviolet (EUV) emission from Xe plasma in the λ=13.5 nm band is theoretically investigated for lithographic application. It appears that a large number of satellite lines due to the 4d-4f, 4d-5p, and 4p-4d transitions significantly contribute to the emission over the spectral range from 10 to 17 nm. At electron densities above 1020 cm3, laser-produced Xe plasmas attain quasilocal thermodynamic equilibrium (LTE) in order to make the emission intensity in the 13.5 nm band comparable to that in the 11 nm band.

Original language	English
Pages (from-to)	5857-5859
Number of pages	3
Journal	Applied Physics Letters
Volume	85
Issue number	24
DOIs	https://doi.org/10.1063/1.1834994
Publication status	Published - Dec 13 2004

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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@article{43da43dabcfd4ed6b6f8c320e5d502e3,

title = "Effect of the satellite lines and opacity on the extreme ultraviolet emission from high-density Xe plasmas",

abstract = "Extreme ultraviolet (EUV) emission from Xe plasma in the λ=13.5 nm band is theoretically investigated for lithographic application. It appears that a large number of satellite lines due to the 4d-4f, 4d-5p, and 4p-4d transitions significantly contribute to the emission over the spectral range from 10 to 17 nm. At electron densities above 1020 cm3, laser-produced Xe plasmas attain quasilocal thermodynamic equilibrium (LTE) in order to make the emission intensity in the 13.5 nm band comparable to that in the 11 nm band.",

author = "Akira Sasaki and Katsunobu Nishihara and Masakatsu Murakami and Fumihiro Koike and Takashi Kagawa and Takashi Nishikawa and Kazumi Fujima and Tohru Kawamura and Hiroyuki Furukawa",

year = "2004",

month = dec,

day = "13",

doi = "10.1063/1.1834994",

language = "English",

volume = "85",

pages = "5857--5859",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "24",

}

TY - JOUR

T1 - Effect of the satellite lines and opacity on the extreme ultraviolet emission from high-density Xe plasmas

AU - Sasaki, Akira

AU - Nishihara, Katsunobu

AU - Murakami, Masakatsu

AU - Koike, Fumihiro

AU - Kagawa, Takashi

AU - Nishikawa, Takashi

AU - Fujima, Kazumi

AU - Kawamura, Tohru

AU - Furukawa, Hiroyuki

PY - 2004/12/13

Y1 - 2004/12/13

N2 - Extreme ultraviolet (EUV) emission from Xe plasma in the λ=13.5 nm band is theoretically investigated for lithographic application. It appears that a large number of satellite lines due to the 4d-4f, 4d-5p, and 4p-4d transitions significantly contribute to the emission over the spectral range from 10 to 17 nm. At electron densities above 1020 cm3, laser-produced Xe plasmas attain quasilocal thermodynamic equilibrium (LTE) in order to make the emission intensity in the 13.5 nm band comparable to that in the 11 nm band.

AB - Extreme ultraviolet (EUV) emission from Xe plasma in the λ=13.5 nm band is theoretically investigated for lithographic application. It appears that a large number of satellite lines due to the 4d-4f, 4d-5p, and 4p-4d transitions significantly contribute to the emission over the spectral range from 10 to 17 nm. At electron densities above 1020 cm3, laser-produced Xe plasmas attain quasilocal thermodynamic equilibrium (LTE) in order to make the emission intensity in the 13.5 nm band comparable to that in the 11 nm band.

UR - http://www.scopus.com/inward/record.url?scp=20444496525&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=20444496525&partnerID=8YFLogxK

U2 - 10.1063/1.1834994

DO - 10.1063/1.1834994

M3 - Article

AN - SCOPUS:20444496525

SN - 0003-6951

VL - 85

SP - 5857

EP - 5859

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 24

ER -

Effect of the satellite lines and opacity on the extreme ultraviolet emission from high-density Xe plasmas

Abstract

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