Abstract
Crystallization behavior of sol-gel-based TiO2 precursor films by vacuum ultraviolet (VUV) light illumination was investigated. VUV light illumination induces densification of films. This reaction accompanies the removal of organic compounds and OH groups with increasing apparent coordination number of titanium in the film from five to six. This structure change enhances film crystallization; polycrystalline anatase films were obtained by post annealing at 300 °C. Crystallization behavior suggested that proper balance of densification and removal of organic compounds are important tasks for further lowering crystallization temperature.
Original language | English |
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Pages (from-to) | 112-116 |
Number of pages | 5 |
Journal | Surface and Coatings Technology |
Volume | 192 |
Issue number | 1 |
DOIs | |
Publication status | Published - Mar 1 2005 |
Externally published | Yes |
Keywords
- Crystallization
- Photocatalyst
- Sol gel
- Titanium oxide
- Vacuum ultraviolet
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry