TY - GEN
T1 - Effects of focusing condition on micro-welding characteristics of borosilicate glass by picosecond pulsed laser
AU - Takekuni, Tomohiro
AU - Okamoto, Yasuhiro
AU - Fujiwara, Takahiro
AU - Okada, Akira
AU - Miyamoto, Isamu
N1 - Publisher Copyright:
© (2015) Trans Tech Publications, Switzerland.
Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2015
Y1 - 2015
N2 - Glass materials are widely used in products such as optical components and semiconductor devices. In these products, precision welding techniques of glass are required to manufacture small and complicated shape. The laser welding method can perform the joining without an intermediate layer and an adhesive agent. In addition, an ultra-short pulse laser can reduce the heat affected zone with the high space accuracy. However, heating and cooling cycles are repeated even in the case of ultra-short pulsed laser. The temperature distribution and change of molten area are influenced not only by laser energy condition but also focusing condition. Therefore in this study, effects of focusing condition of laser beam on micro-welding characteristics of glass were experimentally investigated by using a picosecond pulsed laser. A usage of object lens with the spherical aberration correction led to a large molten area even at the same pulse energy, which related to the efficient welding of glass materials. An optical system with the spherical aberration correction led to stabilizing the shape of molten area, which resulted in the reliable weld joint.
AB - Glass materials are widely used in products such as optical components and semiconductor devices. In these products, precision welding techniques of glass are required to manufacture small and complicated shape. The laser welding method can perform the joining without an intermediate layer and an adhesive agent. In addition, an ultra-short pulse laser can reduce the heat affected zone with the high space accuracy. However, heating and cooling cycles are repeated even in the case of ultra-short pulsed laser. The temperature distribution and change of molten area are influenced not only by laser energy condition but also focusing condition. Therefore in this study, effects of focusing condition of laser beam on micro-welding characteristics of glass were experimentally investigated by using a picosecond pulsed laser. A usage of object lens with the spherical aberration correction led to a large molten area even at the same pulse energy, which related to the efficient welding of glass materials. An optical system with the spherical aberration correction led to stabilizing the shape of molten area, which resulted in the reliable weld joint.
KW - Glass
KW - Micro-welding
KW - Numerical aperture
KW - Ultra-short pulsed laser
UR - http://www.scopus.com/inward/record.url?scp=84952360767&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84952360767&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/KEM.656-657.461
DO - 10.4028/www.scientific.net/KEM.656-657.461
M3 - Conference contribution
AN - SCOPUS:84952360767
SN - 9783038354956
T3 - Key Engineering Materials
SP - 461
EP - 467
BT - Recent Development in Machining, Materials and Mechanical Technologies
A2 - Chen, Jyh-Chen
A2 - Hiroshi, Usuki
A2 - Lee, Sheng-Wei
A2 - Fuh, Yiin-Kuen
PB - Trans Tech Publications Ltd
T2 - International Conference on Machining, Materials and Mechanical Technologies, IC3MT 2014
Y2 - 31 August 2014 through 5 September 2014
ER -