TY - GEN
T1 - Effects of indium incorporation on the optical properties of ZnO films
AU - Cao, Yongge
AU - Miao, Lei
AU - Tanemura, Sakae
AU - Hayashi, Yasuhiko
AU - Tanemura, Masaki
N1 - Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2006
Y1 - 2006
N2 - Transparent indium-doped ZnO (IZO) films with low In content (<6at%) were fabricated through radio-frequency (rf) helicon magnetron sputtering. Formation of In-Zn-O solid solution was confirmed by X-ray diffraction (XRD) patterns. Incorporation of indium into ZnO films enhances the optical transmission in the visible wavelength. The optical band-gaps slightly increase from 3.25eV (ZnO) to 3.28eV (In0.04Zn0.96O) and to 3.30eV (In0.06Zn0.94O) due to Burstain-Moss effect. The Urbach tail parameter E0, which is believed to be a function of structural disorder, increases from 79meV (ZnO), to 146meV (In0.04Zn0.96O), and to 173meV (In0.06Zn0.94O), which is consistent with increase of Full-Width Half-Maximum (FWHM) in corresponding XRD patterns. Decreasing in crystal quality with increasing indium concentration is also confirmed by photoluminescence spectra.
AB - Transparent indium-doped ZnO (IZO) films with low In content (<6at%) were fabricated through radio-frequency (rf) helicon magnetron sputtering. Formation of In-Zn-O solid solution was confirmed by X-ray diffraction (XRD) patterns. Incorporation of indium into ZnO films enhances the optical transmission in the visible wavelength. The optical band-gaps slightly increase from 3.25eV (ZnO) to 3.28eV (In0.04Zn0.96O) and to 3.30eV (In0.06Zn0.94O) due to Burstain-Moss effect. The Urbach tail parameter E0, which is believed to be a function of structural disorder, increases from 79meV (ZnO), to 146meV (In0.04Zn0.96O), and to 173meV (In0.06Zn0.94O), which is consistent with increase of Full-Width Half-Maximum (FWHM) in corresponding XRD patterns. Decreasing in crystal quality with increasing indium concentration is also confirmed by photoluminescence spectra.
KW - Helicon magnetron sputtering
KW - In-Zn-O (IZO) films
KW - Optical transmission
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U2 - 10.4028/www.scientific.net/amr.11-12.159
DO - 10.4028/www.scientific.net/amr.11-12.159
M3 - Conference contribution
AN - SCOPUS:33745954012
SN - 0878499792
SN - 9780878499793
T3 - Advanced Materials Research
SP - 159
EP - 162
BT - AICAM 2005 - Proceedings of the Asian International Conference on Advanced Materials
PB - Trans Tech Publications
T2 - AICAM 2005 - Asian International Conference on Advanced Materials
Y2 - 3 November 2005 through 5 November 2005
ER -