Effects of vacuum ultraviolet light illumination and seeding on crystallization of sol-gel-derived titanium dioxide precursor films using plasma treatment

Naoki Arimitsu; Akira Nakajima; Yoshikazu Kameshima; Yuko Shibayama; Hisashi Ohsaki; Kiyoshi Okada

doi:10.1016/j.surfcoat.2006.06.014

Effects of vacuum ultraviolet light illumination and seeding on crystallization of sol-gel-derived titanium dioxide precursor films using plasma treatment

Naoki Arimitsu, Akira Nakajima, Yoshikazu Kameshima, Yuko Shibayama, Hisashi Ohsaki, Kiyoshi Okada

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

The current study investigated the effects of vacuum ultraviolet (VUV) illumination and seeding on the crystallization of sol-gel-derived titanium dioxide (TiO₂) precursor films on Si(100) and Pyrex glass substrates by plasma treatment. To improve the film microstructure to one that is amenable to crystallization, VUV illumination is found to be effective. However, crystallization behavior suggests that a proper balance between decomposition of organic compounds and densification by dehydration is important for the treatment. The combination of seeding and VUV illumination is effective even for crystallization by plasma treatment on both Si(100) and Pyrex glass substrates.

Original language	English
Pages (from-to)	3038-3043
Number of pages	6
Journal	Surface and Coatings Technology
Volume	201
Issue number	6
DOIs	https://doi.org/10.1016/j.surfcoat.2006.06.014
Publication status	Published - Dec 4 2006
Externally published	Yes

Keywords

Crystallization
Plasma
Seeding
Titanium oxide
Vacuum ultraviolet

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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10.1016/j.surfcoat.2006.06.014

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title = "Effects of vacuum ultraviolet light illumination and seeding on crystallization of sol-gel-derived titanium dioxide precursor films using plasma treatment",

abstract = "The current study investigated the effects of vacuum ultraviolet (VUV) illumination and seeding on the crystallization of sol-gel-derived titanium dioxide (TiO2) precursor films on Si(100) and Pyrex glass substrates by plasma treatment. To improve the film microstructure to one that is amenable to crystallization, VUV illumination is found to be effective. However, crystallization behavior suggests that a proper balance between decomposition of organic compounds and densification by dehydration is important for the treatment. The combination of seeding and VUV illumination is effective even for crystallization by plasma treatment on both Si(100) and Pyrex glass substrates.",

keywords = "Crystallization, Plasma, Seeding, Titanium oxide, Vacuum ultraviolet",

author = "Naoki Arimitsu and Akira Nakajima and Yoshikazu Kameshima and Yuko Shibayama and Hisashi Ohsaki and Kiyoshi Okada",

note = "Funding Information: The authors are grateful to Dr. Naoya Yoshida in the Center of Collaborative Research in the University of Tokyo for his help in film characterization. This research was supported in part by a grant (#18655085) from the Ministry of Education, Culture, Sports, Science, and Technology of Japan.",

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doi = "10.1016/j.surfcoat.2006.06.014",

language = "English",

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journal = "Surface and Coatings Technology",

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T1 - Effects of vacuum ultraviolet light illumination and seeding on crystallization of sol-gel-derived titanium dioxide precursor films using plasma treatment

AU - Arimitsu, Naoki

AU - Nakajima, Akira

AU - Kameshima, Yoshikazu

AU - Shibayama, Yuko

AU - Ohsaki, Hisashi

AU - Okada, Kiyoshi

N1 - Funding Information: The authors are grateful to Dr. Naoya Yoshida in the Center of Collaborative Research in the University of Tokyo for his help in film characterization. This research was supported in part by a grant (#18655085) from the Ministry of Education, Culture, Sports, Science, and Technology of Japan.

PY - 2006/12/4

Y1 - 2006/12/4

N2 - The current study investigated the effects of vacuum ultraviolet (VUV) illumination and seeding on the crystallization of sol-gel-derived titanium dioxide (TiO2) precursor films on Si(100) and Pyrex glass substrates by plasma treatment. To improve the film microstructure to one that is amenable to crystallization, VUV illumination is found to be effective. However, crystallization behavior suggests that a proper balance between decomposition of organic compounds and densification by dehydration is important for the treatment. The combination of seeding and VUV illumination is effective even for crystallization by plasma treatment on both Si(100) and Pyrex glass substrates.

AB - The current study investigated the effects of vacuum ultraviolet (VUV) illumination and seeding on the crystallization of sol-gel-derived titanium dioxide (TiO2) precursor films on Si(100) and Pyrex glass substrates by plasma treatment. To improve the film microstructure to one that is amenable to crystallization, VUV illumination is found to be effective. However, crystallization behavior suggests that a proper balance between decomposition of organic compounds and densification by dehydration is important for the treatment. The combination of seeding and VUV illumination is effective even for crystallization by plasma treatment on both Si(100) and Pyrex glass substrates.

KW - Crystallization

KW - Plasma

KW - Seeding

KW - Titanium oxide

KW - Vacuum ultraviolet

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VL - 201

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JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

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ER -

Effects of vacuum ultraviolet light illumination and seeding on crystallization of sol-gel-derived titanium dioxide precursor films using plasma treatment

Abstract

Keywords

ASJC Scopus subject areas

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