Estimations on high energy ions and neutral particles from LPP EUV light sources

H. Furukawa; T. Kawamura; T. Nishikawa; A. Sasaki; K. Fujima; S. Fujioka; H. Nishimura; K. Nishihara; N. Miyanaga; Y. Izawa; C. Yamanaka

doi:10.1117/12.597959

Estimations on high energy ions and neutral particles from LPP EUV light sources

H. Furukawa, T. Kawamura, T. Nishikawa, A. Sasaki, K. Fujima, S. Fujioka, H. Nishimura, K. Nishihara, N. Miyanaga, Y. Izawa, C. Yamanaka

Research output: Contribution to journal › Conference article › peer-review

Abstract

We have developed an integrated Laser Ablation Fluid RAdiation simulation Code (LAFRAC) to estimate the behaviors of highly energetic ions and neutral particles from LPP EUV light sources, and estimated recombination and charge transfer processes between the particles from laser-produced Xe EUV light sources. We clarify that charge transfer effects greatly affect on the number density of neutral particles, especially high energy ( more than roughly 500 eV ) neutral particles.

Original language	English
Article number	93
Pages (from-to)	789-797
Number of pages	9
Journal	Progress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume	5751
Issue number	II
DOIs	https://doi.org/10.1117/12.597959
Publication status	Published - Sept 19 2005
Event	Emerging Lithographic Technologies IX - San Jose, CA, United States Duration: Mar 1 2005 → Mar 3 2005

Keywords

EUV light sources
Highly energetic ions
Laser-produced plasmas
Neutral particles

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Biomaterials
Atomic and Molecular Physics, and Optics
Radiology Nuclear Medicine and imaging

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title = "Estimations on high energy ions and neutral particles from LPP EUV light sources",

abstract = "We have developed an integrated Laser Ablation Fluid RAdiation simulation Code (LAFRAC) to estimate the behaviors of highly energetic ions and neutral particles from LPP EUV light sources, and estimated recombination and charge transfer processes between the particles from laser-produced Xe EUV light sources. We clarify that charge transfer effects greatly affect on the number density of neutral particles, especially high energy ( more than roughly 500 eV ) neutral particles.",

keywords = "EUV light sources, Highly energetic ions, Laser-produced plasmas, Neutral particles",

author = "H. Furukawa and T. Kawamura and T. Nishikawa and A. Sasaki and K. Fujima and S. Fujioka and H. Nishimura and K. Nishihara and N. Miyanaga and Y. Izawa and C. Yamanaka",

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TY - JOUR

T1 - Estimations on high energy ions and neutral particles from LPP EUV light sources

AU - Furukawa, H.

AU - Kawamura, T.

AU - Nishikawa, T.

AU - Sasaki, A.

AU - Fujima, K.

AU - Fujioka, S.

AU - Nishimura, H.

AU - Nishihara, K.

AU - Miyanaga, N.

AU - Izawa, Y.

AU - Yamanaka, C.

PY - 2005/9/19

Y1 - 2005/9/19

N2 - We have developed an integrated Laser Ablation Fluid RAdiation simulation Code (LAFRAC) to estimate the behaviors of highly energetic ions and neutral particles from LPP EUV light sources, and estimated recombination and charge transfer processes between the particles from laser-produced Xe EUV light sources. We clarify that charge transfer effects greatly affect on the number density of neutral particles, especially high energy ( more than roughly 500 eV ) neutral particles.

AB - We have developed an integrated Laser Ablation Fluid RAdiation simulation Code (LAFRAC) to estimate the behaviors of highly energetic ions and neutral particles from LPP EUV light sources, and estimated recombination and charge transfer processes between the particles from laser-produced Xe EUV light sources. We clarify that charge transfer effects greatly affect on the number density of neutral particles, especially high energy ( more than roughly 500 eV ) neutral particles.

KW - EUV light sources

KW - Highly energetic ions

KW - Laser-produced plasmas

KW - Neutral particles

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SP - 789

EP - 797

JO - Progress in Biomedical Optics and Imaging - Proceedings of SPIE

JF - Progress in Biomedical Optics and Imaging - Proceedings of SPIE

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T2 - Emerging Lithographic Technologies IX

Y2 - 1 March 2005 through 3 March 2005

ER -

Estimations on high energy ions and neutral particles from LPP EUV light sources

Abstract

Keywords

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