Evaluation of Multi-Dimensional Force Measurement Apparatus using Zero-Compliance Principle in Microforce Measurement

Measuring microforce is inevitable in the current technical world of micro-assembly and micromanipulation. Zero-compliance principle is implemented in measuring microforce. There are two floators suspended in series to achieve zero-compliance in force measurement. The first floator is denoted as detection point and the second floator is denoted as point of force. If external force is applied at the point of force, the detection point displaces to balance the force and in result, the point of force maintains its position. The amount of the applied force is estimated from the displacement of the detection point. A novel multi-dimensional force measurement apparatus is designed and developed based on the zero-compliance principle to measure microforce. Evaluation of the apparatus in microforce measurement is demonstrated in this paper by using vertical direction force measurement results.