Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics

Masato Futagawa, Shin Ogasahara, Tatsumi Ito, Mitsuru Komatsu, Yasushi Fuwa, Harutoyo Hirano, Ippei Akita, Kenichiro Kusano, Minoru Watanabe

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    1 Citation (Scopus)

    Abstract

    A low-leakage-current type impedance sensor chip with shield structures has been fabricated. The low limit detection of soil-water-content measurement was improved compared with that of the other semiconductor type sensors. The shield structures were fabricated under the impedance sensor areas. To measure weak signal current eliminated the leakage current, we proposed a new operation circuit to separate the leakage current. Our sensor achieved to measure low water content 10 % or less.

    Original languageEnglish
    Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
    PublisherInstitute of Electrical and Electronics Engineers Inc.
    Pages1136-1139
    Number of pages4
    ISBN (Electronic)9781538627310
    DOIs
    Publication statusPublished - Jul 26 2017
    Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
    Duration: Jun 18 2017Jun 22 2017

    Publication series

    NameTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

    Other

    Other19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
    Country/TerritoryTaiwan, Province of China
    CityKaohsiung
    Period6/18/176/22/17

    Keywords

    • Impedance sensor
    • slope failure prognostics
    • soil water content

    ASJC Scopus subject areas

    • Chemical Health and Safety
    • Instrumentation
    • Electrical and Electronic Engineering

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