Fabrication of Ge nanoneedles by ion-irradiation method

Ako Miyawaki, M. Zamri, T. Hayashi, Y. Hayashi, M. Tanemura, T. Tokunaga

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


The Ge surfaces irradiated by Ar+ ions at 600eV with simultaneous Ni supply at room temperature were characterized by various kind of densely distributed nanostructures, such as tiny cones, nanorods with a bottlenecked and nanoneedles, depending on the Ni supply rate during Ar+ ion irradiation. As the Ni supply rate decreased, the width of nanostructure formed on the cone tip became thin, and finally slender Ge nanoneedles of 60-80nm in diameter and 100-300nm in length were realized. Because the simultaneously supplied Ni fulfills the prerequisite for the so-called "seed" which enhances the surface texturing, size of clustered Ni atoms during of Ar+ ion irradiation might affect the size of nanostructures formed after the prolonged sputtering.

Original languageEnglish
Pages (from-to)812-815
Number of pages4
JournalSurface and Coatings Technology
Issue number5
Publication statusPublished - Nov 25 2011
Externally publishedYes


  • Ge
  • Ion-irradiation
  • Nanoneedle
  • Nanostructure

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry


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