Fabrication of micro-patterned TiO2 thin films incorporating Ag nanoparticles

Kazuya Nakata; Keizo Udagawa; Donald A. Tryk; Tsuyoshi Ochiai; Shunsuke Nishimoto; Hideki Sakai; Taketoshi Murakami; Masahiko Abe; Akira Fujishima

doi:10.1016/j.matlet.2009.04.035

Fabrication of micro-patterned TiO₂ thin films incorporating Ag nanoparticles

Kazuya Nakata, Keizo Udagawa, Donald A. Tryk, Tsuyoshi Ochiai, Shunsuke Nishimoto, Hideki Sakai, Taketoshi Murakami, Masahiko Abe, Akira Fujishima

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

Abstract

A photosensitive TiO₂ thin film embedded with Ag nanoparticles has been prepared from a Ti(OBu)₄-acetylacetone solution, containing dispersed Ag nanoparticles, by the sol-gel method. UV-visible absorption spectra showed that the thin film obtained has two absorption bands, characteristic of the acetylacetone chelate rings and plasmon resonance from Ag nanoparticles. After the irradiation of UV light, the absorption band from the chelate rings almost disappeared, ascribed to structural changes associated with dissociation of the chelate rings. The thin film after the UV irradiation exhibited a broad absorption band in the IR spectrum, indicating that a Ti-O-Ti network was formed in the thin film. HRTEM and EDX spectra revealed that Ag nanoparticles were present and dispersed in the TiO₂ thin film. Micro-patterns of 50 μm dots have been fabricated by UV irradiation through a corresponding photomask, followed by leaching.

Original language	English
Pages (from-to)	1628-1630
Number of pages	3
Journal	Materials Letters
Volume	63
Issue number	18-19
DOIs	https://doi.org/10.1016/j.matlet.2009.04.035
Publication status	Published - Jul 31 2009
Externally published	Yes

Keywords

Patterning
Silver nanoparticles
Sol-gel preparation
Thin film
TiO

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Access to Document

10.1016/j.matlet.2009.04.035

Cite this

@article{cf732f1867e746b1a64e5a58a577d8e2,

title = "Fabrication of micro-patterned TiO2 thin films incorporating Ag nanoparticles",

abstract = "A photosensitive TiO2 thin film embedded with Ag nanoparticles has been prepared from a Ti(OBu)4-acetylacetone solution, containing dispersed Ag nanoparticles, by the sol-gel method. UV-visible absorption spectra showed that the thin film obtained has two absorption bands, characteristic of the acetylacetone chelate rings and plasmon resonance from Ag nanoparticles. After the irradiation of UV light, the absorption band from the chelate rings almost disappeared, ascribed to structural changes associated with dissociation of the chelate rings. The thin film after the UV irradiation exhibited a broad absorption band in the IR spectrum, indicating that a Ti-O-Ti network was formed in the thin film. HRTEM and EDX spectra revealed that Ag nanoparticles were present and dispersed in the TiO2 thin film. Micro-patterns of 50 μm dots have been fabricated by UV irradiation through a corresponding photomask, followed by leaching.",

keywords = "Patterning, Silver nanoparticles, Sol-gel preparation, Thin film, TiO",

author = "Kazuya Nakata and Keizo Udagawa and Tryk, {Donald A.} and Tsuyoshi Ochiai and Shunsuke Nishimoto and Hideki Sakai and Taketoshi Murakami and Masahiko Abe and Akira Fujishima",

year = "2009",

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day = "31",

doi = "10.1016/j.matlet.2009.04.035",

language = "English",

volume = "63",

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journal = "Materials Letters",

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T1 - Fabrication of micro-patterned TiO2 thin films incorporating Ag nanoparticles

AU - Nakata, Kazuya

AU - Udagawa, Keizo

AU - Tryk, Donald A.

AU - Ochiai, Tsuyoshi

AU - Nishimoto, Shunsuke

AU - Sakai, Hideki

AU - Murakami, Taketoshi

AU - Abe, Masahiko

AU - Fujishima, Akira

PY - 2009/7/31

Y1 - 2009/7/31

N2 - A photosensitive TiO2 thin film embedded with Ag nanoparticles has been prepared from a Ti(OBu)4-acetylacetone solution, containing dispersed Ag nanoparticles, by the sol-gel method. UV-visible absorption spectra showed that the thin film obtained has two absorption bands, characteristic of the acetylacetone chelate rings and plasmon resonance from Ag nanoparticles. After the irradiation of UV light, the absorption band from the chelate rings almost disappeared, ascribed to structural changes associated with dissociation of the chelate rings. The thin film after the UV irradiation exhibited a broad absorption band in the IR spectrum, indicating that a Ti-O-Ti network was formed in the thin film. HRTEM and EDX spectra revealed that Ag nanoparticles were present and dispersed in the TiO2 thin film. Micro-patterns of 50 μm dots have been fabricated by UV irradiation through a corresponding photomask, followed by leaching.

AB - A photosensitive TiO2 thin film embedded with Ag nanoparticles has been prepared from a Ti(OBu)4-acetylacetone solution, containing dispersed Ag nanoparticles, by the sol-gel method. UV-visible absorption spectra showed that the thin film obtained has two absorption bands, characteristic of the acetylacetone chelate rings and plasmon resonance from Ag nanoparticles. After the irradiation of UV light, the absorption band from the chelate rings almost disappeared, ascribed to structural changes associated with dissociation of the chelate rings. The thin film after the UV irradiation exhibited a broad absorption band in the IR spectrum, indicating that a Ti-O-Ti network was formed in the thin film. HRTEM and EDX spectra revealed that Ag nanoparticles were present and dispersed in the TiO2 thin film. Micro-patterns of 50 μm dots have been fabricated by UV irradiation through a corresponding photomask, followed by leaching.

KW - Patterning

KW - Silver nanoparticles

KW - Sol-gel preparation

KW - Thin film

KW - TiO

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