Fabrication of micro-patterned TiO2 thin films incorporating Ag nanoparticles

Kazuya Nakata, Keizo Udagawa, Donald A. Tryk, Tsuyoshi Ochiai, Shunsuke Nishimoto, Hideki Sakai, Taketoshi Murakami, Masahiko Abe, Akira Fujishima

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)


A photosensitive TiO2 thin film embedded with Ag nanoparticles has been prepared from a Ti(OBu)4-acetylacetone solution, containing dispersed Ag nanoparticles, by the sol-gel method. UV-visible absorption spectra showed that the thin film obtained has two absorption bands, characteristic of the acetylacetone chelate rings and plasmon resonance from Ag nanoparticles. After the irradiation of UV light, the absorption band from the chelate rings almost disappeared, ascribed to structural changes associated with dissociation of the chelate rings. The thin film after the UV irradiation exhibited a broad absorption band in the IR spectrum, indicating that a Ti-O-Ti network was formed in the thin film. HRTEM and EDX spectra revealed that Ag nanoparticles were present and dispersed in the TiO2 thin film. Micro-patterns of 50 μm dots have been fabricated by UV irradiation through a corresponding photomask, followed by leaching.

Original languageEnglish
Pages (from-to)1628-1630
Number of pages3
JournalMaterials Letters
Issue number18-19
Publication statusPublished - Jul 31 2009
Externally publishedYes


  • Patterning
  • Silver nanoparticles
  • Sol-gel preparation
  • Thin film
  • TiO

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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