TY - GEN
T1 - Ferroelectric properties of epitaxial BiFe0.97Mn 0.03O3 thin films with different crystal orientations deposited on buffered Si substrates
AU - Go, Hyun Young
AU - Wakiya, Naoki
AU - Kiguchi, Takanori
AU - Yoshioka, Tomohiko
AU - Sakurai, Osamu
AU - Cross, Jeffrey S.
AU - Tanaka, Junzo
AU - Shinozaki, Kazuo
PY - 2010
Y1 - 2010
N2 - We investigated electrical properties of epitaxial Mn doped bismuth ferrite BiFe0.97Mn0.03O3 (BFMO) thin films with different crystal orientations deposited on Si substrates with appropriate buffer layers. Epitaxial SrRuO3 (SRO) thin films with (001), (101), and (111) orientations were grown on CeO2/yttria-stabilized zirconia (YSZ)/Si(001) substrates and YSZ/Si(001), respectively, by the insertion of MgO and TiO2 atomic layers using pulsed-laser deposition (PLD). Using spin coating, we deposited BFMO thin films onto orientated SRO thin films. The BFMO orientation followed the SRO orientation. The Pr values of the BFMO were ordered as follows {111}>{110}>{100}, which is the same as that predicted by crystallographic considerations. The largest Pr value of the {111} orientation is 76 μC/cm2 at 100 kHz, 25°C.
AB - We investigated electrical properties of epitaxial Mn doped bismuth ferrite BiFe0.97Mn0.03O3 (BFMO) thin films with different crystal orientations deposited on Si substrates with appropriate buffer layers. Epitaxial SrRuO3 (SRO) thin films with (001), (101), and (111) orientations were grown on CeO2/yttria-stabilized zirconia (YSZ)/Si(001) substrates and YSZ/Si(001), respectively, by the insertion of MgO and TiO2 atomic layers using pulsed-laser deposition (PLD). Using spin coating, we deposited BFMO thin films onto orientated SRO thin films. The BFMO orientation followed the SRO orientation. The Pr values of the BFMO were ordered as follows {111}>{110}>{100}, which is the same as that predicted by crystallographic considerations. The largest Pr value of the {111} orientation is 76 μC/cm2 at 100 kHz, 25°C.
KW - Crystal orientation
KW - Epitaxial
KW - PLD
KW - Thin film
UR - http://www.scopus.com/inward/record.url?scp=75749140912&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=75749140912&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/KEM.421-422.111
DO - 10.4028/www.scientific.net/KEM.421-422.111
M3 - Conference contribution
AN - SCOPUS:75749140912
SN - 0878493069
SN - 9780878493067
T3 - Key Engineering Materials
SP - 111
EP - 114
BT - Asian Ceramic Science for Electronics III and Electroceramics in Japan XII
PB - Trans Tech Publications Ltd
T2 - 6th Asian Meeting on Electroceramics, AMEC-6, in conjunction with the Electronics Division Meeting of the Ceramic Society of Japan
Y2 - 22 October 2008 through 24 October 2008
ER -