Flow control valve for pneumatic actuators using particle excitation by PZT vibrator

Daisuke Hirooka, Koichi Suzumori, Takefumi Kanda

Research output: Contribution to journalArticlepeer-review

23 Citations (Scopus)


This paper reports a new flow control valve for pneumatic actuators that has a lightweight and simple structure and uses particle excitation by PZT vibrator. The flow control valve in this report consists of an orifice plate which has plural orifices, PZT vibrator which is adhered on the orifice plate and iron particles. The valve is normally closed, because air flow carries the particles on to the orifice and particles seal the air flow. Because the orifice plate excitation by the PZT vibrator works to make the particles away from the orifice plate, the air flows through the orifices. It is driven at resonance mode and can be used as a variable speed controller for pneumatic actuators. The new flow control valve avoids the stopping shock of pneumatic actuators at the stroke ends while retaining the advantages of pneumatic actuators.

Original languageEnglish
Pages (from-to)285-289
Number of pages5
JournalSensors and Actuators, A: Physical
Issue number2
Publication statusPublished - Oct 2009


  • PZT
  • Pneumatic actuator
  • Pneumatic valve
  • Variable orifice

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


Dive into the research topics of 'Flow control valve for pneumatic actuators using particle excitation by PZT vibrator'. Together they form a unique fingerprint.

Cite this