Abstract
Multi-wire EDM slicing method, which combines technologies of electrical discharge machining (EDM) and multi-wire saw, is expected as a high-quality and high-efficient slicing for Si and SiC ingot. However, in this method, the phenomena of working fluid flow have not been clarified yet, and the working fluid flow formed by high-speed wire running was investigated with high-speed camera observation and computational fluid dynamics (CFD) analysis. In the multi-wire EDM, the flow velocity in the vicinity of processing wire electrode is equivalent velocity to fluid flow formed by nozzle jet flushing. Therefore, the working fluid flow in multi-wire EDM has the sufficient performance to exclude debris from the narrow gap without nozzle jet flushing.
| Original language | English |
|---|---|
| Pages | 517-518 |
| Number of pages | 2 |
| Publication status | Published - 2021 |
| Externally published | Yes |
| Event | 10th International Conference on Leading Edge Manufacturing Technologies in 21st Century, LEM 2021 - Virtual, Online Duration: Nov 14 2021 → Nov 18 2021 |
Conference
| Conference | 10th International Conference on Leading Edge Manufacturing Technologies in 21st Century, LEM 2021 |
|---|---|
| City | Virtual, Online |
| Period | 11/14/21 → 11/18/21 |
Keywords
- EDM slicing
- High-speed wire running
- Multi-wire
- Working fluid flow
ASJC Scopus subject areas
- Artificial Intelligence
- Industrial and Manufacturing Engineering
- Electronic, Optical and Magnetic Materials