Abstract
Effects of edge intensity distribution in top-hat mode on removal characteristics of zinc oxide film was experimentally investigated by a nano-second pulsed fiber laser. The usage of mask could change the edge intensity distribution of laser beam. The combination of singlet lens and slit mask could perform the gradual edge and the sharp edge intensity distributions in parallel and perpendicular directions to a scanning line, respectively. This edge intensity combination could achieve high-quality removal with narrow damaged regions around the scribed grooves and reliable removal with stable electrical insulation states at more than a proper overlap rate.
| Original language | English |
|---|---|
| Publication status | Published - Oct 18 2015 |
| Event | 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 - Kyoto, Japan Duration: Oct 18 2015 → Oct 22 2015 |
Other
| Other | 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 |
|---|---|
| Country/Territory | Japan |
| City | Kyoto |
| Period | 10/18/15 → 10/22/15 |
Keywords
- Intensity distribution
- Mask
- Nano-second pulsed fiber laser
- Square core optical fiber
- ZnO
ASJC Scopus subject areas
- Industrial and Manufacturing Engineering