Hydrothermally deposited PZT thin film vibration probe sensor

Misato Sasaki, Takefumi Kanda, Minoru Kuribayashi Kurosawa, Toshiro Higuchi

Research output: Contribution to journalConference articlepeer-review


We have fabricated a touch probe sensor using PZT thin film vibrator. This sensor was designed with the aim of realizing high resolution more than 0.5 nm, low contact force under 100 nN, a wide scanning range in mm scale square and quick scanning surface profile measurement. These features have advantages in measuring nano structure, for example sub micron rule VLSI or micro electro mechanical systems (MEMS). The sensitivity and resolution were 2.0×10-2 mV/nm and 2.4 nm. The sensor device was installed in AFM. Then an image of surface texture was obtained.

Original languageEnglish
Pages (from-to)449-452
Number of pages4
JournalProceedings of the IEEE Ultrasonics Symposium
Publication statusPublished - 2002
Event2002 IEEE Ultrasonics Symposium - Munich, Germany
Duration: Oct 8 2002Oct 11 2002

ASJC Scopus subject areas

  • Acoustics and Ultrasonics


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