Imaging of large-scale integrated circuits using laser terahertz emission microscopy

Masatsugu Yamashita, Kodo Kawase, Chiko Otani, Toshihiko Kiwa, Masayoshi Tonouchi

Research output: Contribution to journalArticlepeer-review

130 Citations (Scopus)


We present the redesign and improved performance of the laser terahertz emission microscope (LTEM), which is a potential tool for locating electrical failures in integrated circuits. The LTEM produces an image of the THz waves emitted when the circuit is irradiated by a femtosecond laser; the amplitude of the THz emission is proportional to the local electric field. By redesigning the optical setup and improving the spatial resolution of the system to below 3 μm, we could extend its application to examining of large-scale integration circuits. As example we show the THz emission pattern of the electric field in an 8-bit microprocessor chip under bias voltage.

Original languageEnglish
Pages (from-to)115-120
Number of pages6
JournalOptics Express
Issue number1
Publication statusPublished - Jan 2005

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics


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