TY - JOUR
T1 - Long-life multiple-ISFETS with polymeric gates
AU - Tsukada, K.
AU - Sebata, M.
AU - Miyahara, Y.
AU - Miyagi, H.
N1 - Funding Information:
This work was supported by a Grant-In-Aid from the Ministry of International Trade and Industry . We are grateful to Dr . U . Oesch-and Prof . Dr . W . Simon of the Swiss Federal Institute of Technology (ETH) for giving us the BTCU plasticizer, and to Dr . Y . Sakai and Mr . T . Yamanaka of Hitachi Ltd . for the device processing and to Dr . M . Ai for helpful suggestions .
PY - 1989/7
Y1 - 1989/7
N2 - Long-life, integrated multiple-ISFETs with CMOS interface circuits have been developed. The interface circuits are designed for impedance conversion and rapid multiplexing of the signal from each ISFET. Three kinds of ion-selective membranes for sodium, potassium and chloride are formed on the gates and separated by a patterned thick polyimide layer. The poor adhesion of the polymeric membrane to the ISFET gate is improved by selecting the proper plasticizer for use in the membrane. As a result, a chemical response for sodium, potassium and chloride can be obtained for more than two months.
AB - Long-life, integrated multiple-ISFETs with CMOS interface circuits have been developed. The interface circuits are designed for impedance conversion and rapid multiplexing of the signal from each ISFET. Three kinds of ion-selective membranes for sodium, potassium and chloride are formed on the gates and separated by a patterned thick polyimide layer. The poor adhesion of the polymeric membrane to the ISFET gate is improved by selecting the proper plasticizer for use in the membrane. As a result, a chemical response for sodium, potassium and chloride can be obtained for more than two months.
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U2 - 10.1016/0250-6874(89)87039-8
DO - 10.1016/0250-6874(89)87039-8
M3 - Article
AN - SCOPUS:0024700778
SN - 0250-6874
VL - 18
SP - 329
EP - 336
JO - Sensors and Actuators
JF - Sensors and Actuators
IS - 3-4
ER -