Measurements of microwave dielectric property of dielectric thin layers using micro-sized planar electrodes

The objective of this study is to measure the dielectric property of dielectric thin layers up to microwave region continuously as a function of frequency using micro-sized planar electrodes. Micro-planar electrodes were formed on to the samples using electron beam lithography. Electromagnetic-field-analysis software was used to design the electrode structure and to evaluate the dielectric properties in microwave region. Two electrode structures, interdigital electrodes and LC resonance electrodes, were employed for the measurements. As the result, the dielectric permittivity of strontium titanate single crystal was measured up to the frequency of 25 GHz continuously as a function of frequency. Furthermore, the dielectric permittivity of an oxide artificial superlattice was also measured up to the frequency of 3 GHz.