This chapter describes micro actuator systems for narrow spaces under specific environments. In the fields of scientific or medical instruments, there is a great demand for micro sensors and actuators. We have fabricated some micro sensors and actuators which can be used under such specific environment. Two types of micro actuator systems for narrow spaces have been fabricated and evaluated. Those are for precise tool control unit and attitude control unit. In the precise tool control unit, a micro servo motor using the micro ultrasonic motor and the magnetic encoder have been designed and fabricated. In the attitude control, flexible displacement sensor made of piezoelectric polymer and shape memory alloy actuator driven by optical source.
ASJC Scopus subject areas
- General Engineering