Micro actuator system for narrow spaces under specific environment

Research output: Chapter in Book/Report/Conference proceedingChapter


This chapter describes micro actuator systems for narrow spaces under specific environments. In the fields of scientific or medical instruments, there is a great demand for micro sensors and actuators. We have fabricated some micro sensors and actuators which can be used under such specific environment. Two types of micro actuator systems for narrow spaces have been fabricated and evaluated. Those are for precise tool control unit and attitude control unit. In the precise tool control unit, a micro servo motor using the micro ultrasonic motor and the magnetic encoder have been designed and fabricated. In the attitude control, flexible displacement sensor made of piezoelectric polymer and shape memory alloy actuator driven by optical source.

Original languageEnglish
Title of host publicationNext-Generation Actuators Leading Breakthroughs
PublisherSpringer London
Number of pages11
ISBN (Print)9781848829909
Publication statusPublished - Dec 1 2010

ASJC Scopus subject areas

  • General Engineering


Dive into the research topics of 'Micro actuator system for narrow spaces under specific environment'. Together they form a unique fingerprint.

Cite this