TY - JOUR
T1 - Micro Linear Pump with Electromagnetic Actuator
AU - Suzumori, Koichi
AU - Furusawa, Hiroaki
AU - Kanda, Takefumi
AU - Nagata, Takashi
AU - Yamada, Yoshiaki
PY - 2005
Y1 - 2005
N2 - In recent years, research and development of the micro-fluid systems have been activated in the field of chemical technology and biotechnology. Micro-fluid systems are realized by micromachine technology and MEMS technology. Micro pump is an essential element for miniaturization of chemical analysis reaction systems. The aim of this research is development of a micro linear pump which will be built into micro-fluid systems. This pump aims to take a sample of very-small-quantity of liquids. Taking a sample of very-small-quantity of liquids reduce the amount used and waste fluid of a reagent. Full length and diameter of this pump are 32.5mm and 6mm respectively. The features of this pump are (1) the pump is built with actuator, (2) the gap of 7μm between piston and cylinder is achieved through fine machining process, and (3) micro check-valves of 2mm diameter made of stainless-steel film are fabricated and integrated. In this paper, the structure and the characteristics of this pump were shown. And the characteristics after improvement of micro check-valves were shown. keyword: micro fluid system, micro lincar pump, sample of very small quantity, built in actuator, miniaturization.
AB - In recent years, research and development of the micro-fluid systems have been activated in the field of chemical technology and biotechnology. Micro-fluid systems are realized by micromachine technology and MEMS technology. Micro pump is an essential element for miniaturization of chemical analysis reaction systems. The aim of this research is development of a micro linear pump which will be built into micro-fluid systems. This pump aims to take a sample of very-small-quantity of liquids. Taking a sample of very-small-quantity of liquids reduce the amount used and waste fluid of a reagent. Full length and diameter of this pump are 32.5mm and 6mm respectively. The features of this pump are (1) the pump is built with actuator, (2) the gap of 7μm between piston and cylinder is achieved through fine machining process, and (3) micro check-valves of 2mm diameter made of stainless-steel film are fabricated and integrated. In this paper, the structure and the characteristics of this pump were shown. And the characteristics after improvement of micro check-valves were shown. keyword: micro fluid system, micro lincar pump, sample of very small quantity, built in actuator, miniaturization.
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U2 - 10.1541/ieejsmas.125.461
DO - 10.1541/ieejsmas.125.461
M3 - Article
AN - SCOPUS:77953654573
SN - 1341-8939
VL - 125
SP - 461
EP - 466
JO - IEEJ Transactions on Sensors and Micromachines
JF - IEEJ Transactions on Sensors and Micromachines
IS - 12
ER -