Micro Linear Pump with Electromagnetic Actuator

Koichi Suzumori, Hiroaki Furusawa, Takefumi Kanda, Takashi Nagata, Yoshiaki Yamada

Research output: Contribution to journalArticlepeer-review


In recent years, research and development of the micro-fluid systems have been activated in the field of chemical technology and biotechnology. Micro-fluid systems are realized by micromachine technology and MEMS technology. Micro pump is an essential element for miniaturization of chemical analysis reaction systems. The aim of this research is development of a micro linear pump which will be built into micro-fluid systems. This pump aims to take a sample of very-small-quantity of liquids. Taking a sample of very-small-quantity of liquids reduce the amount used and waste fluid of a reagent. Full length and diameter of this pump are 32.5mm and 6mm respectively. The features of this pump are (1) the pump is built with actuator, (2) the gap of 7μm between piston and cylinder is achieved through fine machining process, and (3) micro check-valves of 2mm diameter made of stainless-steel film are fabricated and integrated. In this paper, the structure and the characteristics of this pump were shown. And the characteristics after improvement of micro check-valves were shown. keyword: micro fluid system, micro lincar pump, sample of very small quantity, built in actuator, miniaturization.

Original languageEnglish
Pages (from-to)461-466
Number of pages6
JournalIEEJ Transactions on Sensors and Micromachines
Issue number12
Publication statusPublished - 2005

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering


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