Abstract
Effect of wavelength on machining characteristics of AlN and SiC in micro-drilling using Q-swithched YAG harmonic was experimentally investigated. The drilled depth increased with the decrease of wavelength. Besides, under the reduced pressure condition, the drilled depth increased and the better surface integrity could be obtained compared to the atmospheric condition. The circumference region around drilled hole was oxidized, and the oxidization in the case of fourth harmonic was more remarkable than that in second harmonic. In the initial stage of drilling for AlN, the thermal expansion was observed at the irradiated point in the case of fundamental wavelength, while higher harmonic made it possible to drill without thermal expansion.
| Original language | English |
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| Publication status | Published - Dec 1 2007 |
| Event | 4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007 - Fukuoka, Japan Duration: Nov 7 2007 → Nov 9 2007 |
Other
| Other | 4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007 |
|---|---|
| Country/Territory | Japan |
| City | Fukuoka |
| Period | 11/7/07 → 11/9/07 |
Keywords
- Ceramics
- Harmonics of Nd: YAG laser
- Micro-drilling
- Removal depth
ASJC Scopus subject areas
- Industrial and Manufacturing Engineering