Noncyclic scheduling of dual-armed cluster tools for minimization of wafer residency time and makespan

Masaru Sakai, Tatsushi Nishi

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Noncyclic scheduling of dual-armed cluster tools for minimization of wafer residency time and makespan'. Together they form a unique fingerprint.

Engineering & Materials Science