TY - GEN
T1 - Nondestructive inspection of SiGe films using laser terahertz emission microscopy
AU - Nakamura, Akihiro
AU - Omura, Ken
AU - Sakai, Kenji
AU - Kiwa, Toshihiko
AU - Tsukada, Keiji
PY - 2013/10/18
Y1 - 2013/10/18
N2 - Laser terahertz emission microscopy was applied to investigate the SiGe film on the Si substrate. In this study, as the initial experiment to apply LTEM to non-destructive evaluation of the strained SiGe films, the THz emission properties of the strained-SiGe were measured.
AB - Laser terahertz emission microscopy was applied to investigate the SiGe film on the Si substrate. In this study, as the initial experiment to apply LTEM to non-destructive evaluation of the strained SiGe films, the THz emission properties of the strained-SiGe were measured.
UR - http://www.scopus.com/inward/record.url?scp=84885462360&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84885462360&partnerID=8YFLogxK
U2 - 10.1109/CLEOPR.2013.6600524
DO - 10.1109/CLEOPR.2013.6600524
M3 - Conference contribution
AN - SCOPUS:84885462360
SN - 9781467364751
T3 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
BT - 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
T2 - 10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
Y2 - 30 June 2013 through 4 July 2013
ER -