Observation of plasma behavior in micro-machining of ceramics by harmonics of Nd:YAG laser

Norihiro Hayashi, Yasuhiro Okamoto, Yoshiyuki Uno, Tomokazu Sakagawa

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


Precision micro-machining without cracks and with a narrow heat affected zone is highly required for the effective use of high-performance material. For this purpose, it is expected that the higher harmonics of Nd:YAG laser could perform the precision micro-machining by its high photon energy. However, even using harmonics of Nd:YAG laser, the heat affected zone is inevitable due to the plasma generation. In order to reduce the influence of plasma, it is important to understand the generation mechanism of plasma. Therefore, the laser induced plasma was observed by the high-speed shutter camera, and the influence of laser wavelength on machining characteristics was investigated.

Original languageEnglish
Pages (from-to)867-874
Number of pages8
JournalJournal of Advanced Mechanical Design, Systems and Manufacturing
Issue number5
Publication statusPublished - 2010


  • Harmonics of Nd:YAG laser
  • High-speed observation
  • Micro-boring
  • Plasma
  • Removal depth

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering


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