Optical waveguiding properties of sputtered linb03 single crystalthin films on litaoj substrates

A. Okada

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

Optical waveguiding layers of LiNb03 on LiTaO, substrates were obtained by rf sputtering. The LiNb03 layer was determined to be a single crystal over the whole deposited region by reflection electron diffraction patterns. Propagation of TEo and TMo modes were observed for an as-sputtered film, and TEo, TEI, TMo modes for a film annealed at 1 loOoc for 10 minutes. The layer's effective thickness and refractive index (no) of 2500 A and 2.318 at 6328 A respectively, were calculated from the coupling conditions. The losses were 16 dB/cm for the as-sputtered film and 8 dB/cm for the annealed film.

Original languageEnglish
Pages (from-to)739-742
Number of pages4
JournalFerroelectrics
Volume14
Issue number1
DOIs
Publication statusPublished - Jan 1 1976
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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