Oxygen molecules stably caged in a UV irradiated thin film from peroxo polytungstic acids

Akira Kishimoto; Naosuke Matsuzaki; Tetsuichi Kudo

doi:10.2109/jcersj.101.143

Oxygen molecules stably caged in a UV irradiated thin film from peroxo polytungstic acids

Akira Kishimoto, Naosuke Matsuzaki, Tetsuichi Kudo

Research output: Contribution to journal › Article › peer-review

Abstract

Peroxo polytungstic acids are promising inorganic resist materials which become insoluble in water by UV irradiation. After UV irradiation, part of oxygen molecules, decomposition product of the peroxo groups, was stably caged in the amorphous network. This mechanism is discussed in connection with the densification of thin films during UV irradiation.

Original language	English
Pages (from-to)	143-144
Number of pages	2
Journal	Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan
Volume	101
Issue number	1169
DOIs	https://doi.org/10.2109/jcersj.101.143
Publication status	Published - 1993
Externally published	Yes

ASJC Scopus subject areas

Ceramics and Composites
Chemistry(all)
Condensed Matter Physics
Materials Chemistry

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10.2109/jcersj.101.143

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@article{eb910bfd4501424caf04236840e38a76,

title = "Oxygen molecules stably caged in a UV irradiated thin film from peroxo polytungstic acids",

abstract = "Peroxo polytungstic acids are promising inorganic resist materials which become insoluble in water by UV irradiation. After UV irradiation, part of oxygen molecules, decomposition product of the peroxo groups, was stably caged in the amorphous network. This mechanism is discussed in connection with the densification of thin films during UV irradiation.",

author = "Akira Kishimoto and Naosuke Matsuzaki and Tetsuichi Kudo",

year = "1993",

doi = "10.2109/jcersj.101.143",

language = "English",

volume = "101",

pages = "143--144",

journal = "Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan",

issn = "1882-0743",

publisher = "Ceramic Society of Japan/Nippon Seramikkusu Kyokai",

number = "1169",

}

TY - JOUR

T1 - Oxygen molecules stably caged in a UV irradiated thin film from peroxo polytungstic acids

AU - Kishimoto, Akira

AU - Matsuzaki, Naosuke

AU - Kudo, Tetsuichi

PY - 1993

Y1 - 1993

N2 - Peroxo polytungstic acids are promising inorganic resist materials which become insoluble in water by UV irradiation. After UV irradiation, part of oxygen molecules, decomposition product of the peroxo groups, was stably caged in the amorphous network. This mechanism is discussed in connection with the densification of thin films during UV irradiation.

AB - Peroxo polytungstic acids are promising inorganic resist materials which become insoluble in water by UV irradiation. After UV irradiation, part of oxygen molecules, decomposition product of the peroxo groups, was stably caged in the amorphous network. This mechanism is discussed in connection with the densification of thin films during UV irradiation.

UR - http://www.scopus.com/inward/record.url?scp=0027307346&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0027307346&partnerID=8YFLogxK

U2 - 10.2109/jcersj.101.143

DO - 10.2109/jcersj.101.143

M3 - Article

AN - SCOPUS:0027307346

SN - 1882-0743

VL - 101

SP - 143

EP - 144

JO - Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan

JF - Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan

IS - 1169

ER -

Oxygen molecules stably caged in a UV irradiated thin film from peroxo polytungstic acids

Abstract

ASJC Scopus subject areas

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